Gunderson Christopher, Zhang Bo
Department of Chemistry, University of Washington, Seattle Washington 98195 United States.
J Electroanal Chem (Lausanne). 2016 Nov 15;781:174-180. doi: 10.1016/j.jelechem.2016.10.054. Epub 2016 Oct 27.
We report the preparation and electrochemical characterization of massive electrochemical arrays containing as many as 110,000 highly uniform ultramicroelectrodes (UMEs). These arrays were microfabricated using conventional photolithography techniques on a gold-coated silicon chip in a simple three-step method. Photoresist polymer was used as an effective insulating matrix to define 2 μm, 3 μm, and 4 μm diameter circular UMEs across a 1 × 1 mm area. The UME arrays are high uniform and contain tens of thousands of active disk-shape UMEs slightly recessed in thin films of photoresist. These arrays were tested with cyclic voltammetry and copper electrodeposition to assess the adhesion of photoresist to the gold surface as well as to examine their electrochemical activity. Numerical simulations were performed to further validate their electrochemical response. These UME arrays can be a useful platform for fundamental understanding molecular transport in uniform electrochemical arrays and designing highly-sensitive electroanalytical sensors.
我们报告了包含多达110,000个高度均匀的超微电极（UME）的大规模电化学阵列的制备及电化学表征。这些阵列采用传统光刻技术，通过一种简单的三步法在镀金硅芯片上进行微加工。光刻胶聚合物用作有效的绝缘基质，在1×1毫米的区域内定义直径为2μm、3μm和4μm的圆形UME。UME阵列高度均匀，包含数万个呈圆盘状的活性UME，它们略微凹陷于光刻胶薄膜中。通过循环伏安法和铜电沉积对这些阵列进行测试，以评估光刻胶与金表面的附着力，并检测其电化学活性。进行了数值模拟以进一步验证其电化学响应。这些UME阵列可成为一个有用的平台，用于深入理解均匀电化学阵列中的分子传输以及设计高灵敏度的电分析传感器。
