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厘米尺度尖晶石铁氧体薄膜的外延剥离及其在柔性电子学中的应用。

Epitaxial Lift-Off of Centimeter-Scaled Spinel Ferrite Oxide Thin Films for Flexible Electronics.

机构信息

School of Microelectronics and State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, 710049, China.

College of Precision Instrument and Optoelectronic Engineering, Tianjin University, Key Laboratory of Optoelectronic Information and Technology (Ministry of Education), Tianjin, 300072, China.

出版信息

Adv Mater. 2017 Sep;29(33). doi: 10.1002/adma.201702411. Epub 2017 Jun 22.

DOI:10.1002/adma.201702411
PMID:28639318
Abstract

Mechanical flexibility of electronic devices has attracted much attention from research due to the great demand in practical applications and rich commercial value. Integration of functional oxide materials in flexible polymer materials has proven an effective way to achieve flexibility of functional electronic devices. However, the chemical and mechanical incompatibilities at the interfaces of dissimilar materials make it still a big challenge to synthesize high-quality single-crystalline oxide thin film directly on flexible polymer substrates. This study reports an improved method that is employed to successfully transfer a centimeter-scaled single-crystalline LiFe O thin film on polyimide substrate. Structural characterizations show that the transferred films have essentially no difference in comparison with the as-grown films with respect to the microstructure. In particular, the transferred LiFe O films exhibit excellent magnetic properties under various mechanical bending statuses and show excellent fatigue properties during the bending cycle tests. These results demonstrate that the improved transfer method provides an effective way to compose single-crystalline functional oxide thin films onto flexible substrates for applications in flexible and wearable electronics.

摘要

由于在实际应用和丰富的商业价值方面的巨大需求,电子设备的机械柔韧性引起了研究人员的广泛关注。将功能氧化物材料集成到柔性聚合物材料中已被证明是实现功能性电子设备柔韧性的有效方法。然而,不同材料界面的化学和机械不相容性使得在柔性聚合物衬底上直接合成高质量的单晶氧化物薄膜仍然是一个巨大的挑战。本研究报告了一种改进的方法,该方法成功地将厘米级的单晶 LiFeO 薄膜转移到聚酰亚胺衬底上。结构表征表明,与原始生长的薄膜相比,转移后的薄膜在微观结构上几乎没有区别。特别是,在各种机械弯曲状态下,转移的 LiFeO 薄膜表现出优异的磁性,并在弯曲循环测试中表现出优异的疲劳性能。这些结果表明,改进的转移方法为将单晶功能氧化物薄膜组装到柔性衬底上提供了一种有效的方法,可应用于柔性和可穿戴电子设备。

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