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锗上挠曲电钛酸钡薄膜的高度异质外延

Highly heterogeneous epitaxy of flexoelectric BaTiO membrane on Ge.

作者信息

Dai Liyan, Zhao Jinyan, Li Jingrui, Chen Bohan, Zhai Shijie, Xue Zhongying, Di Zengfeng, Feng Boyuan, Sun Yanxiao, Luo Yunyun, Ma Ming, Zhang Jie, Ding Sunan, Zhao Libo, Jiang Zhuangde, Luo Wenbo, Quan Yi, Schwarzkopf Jutta, Schroeder Thomas, Ye Zuo-Guang, Xie Ya-Hong, Ren Wei, Niu Gang

机构信息

Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi'an Jiaotong University, Xi'an, 710049, China.

State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, Shanghai, 200050, China.

出版信息

Nat Commun. 2022 May 30;13(1):2990. doi: 10.1038/s41467-022-30724-7.

Abstract

The integration of complex oxides with a wide spectrum of functionalities on Si, Ge and flexible substrates is highly demanded for functional devices in information technology. We demonstrate the remote epitaxy of BaTiO (BTO) on Ge using a graphene intermediate layer, which forms a prototype of highly heterogeneous epitaxial systems. The Ge surface orientation dictates the outcome of remote epitaxy. Single crystalline epitaxial BTO films were grown on graphene/Ge (011), whereas graphene/Ge (001) led to textured films. The graphene plays an important role in surface passivation. The remote epitaxial deposition of BTO follows the Volmer-Weber growth mode, with the strain being partially relaxed at the very beginning of the growth. Such BTO films can be easily exfoliated and transferred to arbitrary substrates like Si and flexible polyimide. The transferred BTO films possess enhanced flexoelectric properties with a gauge factor of as high as 1127. These results not only expand the understanding of heteroepitaxy, but also open a pathway for the applications of devices based on complex oxides.

摘要

在信息技术的功能器件中,在硅、锗和柔性衬底上集成具有广泛功能的复合氧化物的需求极为迫切。我们展示了利用石墨烯中间层在锗上实现钛酸钡(BTO)的远程外延,这形成了高度异质外延系统的一个原型。锗的表面取向决定了远程外延的结果。单晶外延BTO薄膜生长在石墨烯/锗(011)上,而石墨烯/锗(001)则导致形成织构化薄膜。石墨烯在表面钝化中起着重要作用。BTO的远程外延沉积遵循伏尔默-韦伯生长模式,在生长刚开始时应变就部分得到弛豫。这种BTO薄膜能够很容易地被剥离并转移到诸如硅和柔性聚酰亚胺等任意衬底上。转移后的BTO薄膜具有增强的挠曲电特性,其应变系数高达1127。这些结果不仅拓展了对异质外延的理解,还为基于复合氧化物的器件应用开辟了一条途径。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/90b9/9151678/150c7c16f9cc/41467_2022_30724_Fig1_HTML.jpg

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