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基于褶皱石墨烯和阳极氧化铝膜的高灵敏度、超薄压力传感器的结构工程。

Structural Engineering for High Sensitivity, Ultrathin Pressure Sensors Based on Wrinkled Graphene and Anodic Aluminum Oxide Membrane.

机构信息

Department of Electronic Engineering, The Chinese University of Hong Kong , Hong Kong SAR, China.

Institute of Applied Physics and Materials Engineering, University of Macau , Avenida da Universidade, Taipa, Macau 999078, China.

出版信息

ACS Appl Mater Interfaces. 2017 Jul 19;9(28):24111-24117. doi: 10.1021/acsami.7b05515. Epub 2017 Jul 10.

DOI:10.1021/acsami.7b05515
PMID:28657288
Abstract

Nature-motivated pressure sensors have been greatly important components integrated into flexible electronics and applied in artificial intelligence. Here, we report a high sensitivity, ultrathin, and transparent pressure sensor based on wrinkled graphene prepared by a facile liquid-phase shrink method. Two pieces of wrinkled graphene are face to face assembled into a pressure sensor, in which a porous anodic aluminum oxide (AAO) membrane with the thickness of only 200 nm was used to insulate the two layers of graphene. The pressure sensor exhibits ultrahigh operating sensitivity (6.92 kPa), resulting from the insulation in its inactive state and conduction under compression. Formation of current pathways is attributed to the contact of graphene wrinkles through the pores of AAO membrane. In addition, the pressure sensor is also an on/off and energy saving device, due to the complete isolation between the two graphene layers when the sensor is not subjected to any pressure. We believe that our high-performance pressure sensor is an ideal candidate for integration in flexible electronics, but also paves the way for other 2D materials to be involved in the fabrication of pressure sensors.

摘要

受自然启发的压力传感器在集成到柔性电子产品和应用于人工智能方面具有重要作用。在这里,我们报告了一种基于通过简便的液相收缩法制备的褶皱石墨烯的高灵敏度、超薄且透明的压力传感器。两块褶皱石墨烯面对面组装成一个压力传感器,其中使用厚度仅为 200nm 的多孔阳极氧化铝(AAO)膜将两层石墨烯隔开。该压力传感器表现出超高的工作灵敏度(6.92kPa),这归因于其在非活动状态下的绝缘和在压缩下的导通。电流通路的形成是由于通过 AAO 膜的孔接触石墨烯褶皱。此外,由于当传感器不受任何压力时,两个石墨烯层完全隔离,因此该压力传感器也是一个开/关和节能装置。我们相信,我们的高性能压力传感器是集成到柔性电子产品中的理想候选者,同时也为其他二维材料参与压力传感器的制造铺平了道路。

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