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高灵敏度 MoS 湿度传感器阵列用于非接触式感应。

Highly Sensitive MoS Humidity Sensors Array for Noncontact Sensation.

机构信息

Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.

Bejing Institute of Nanoenrgy and Nanosystems, Chinese Academy of Sciences, National Center for Nanoscience and Technology (NCNST), Beijing, 100190, China.

出版信息

Adv Mater. 2017 Sep;29(34). doi: 10.1002/adma.201702076. Epub 2017 Jul 10.

DOI:10.1002/adma.201702076
PMID:28692765
Abstract

Recently, 2D materials exhibit great potential for humidity sensing applications due to the fact that almost all atoms are at the surface. Therefore, the quality of the material surface becomes the key point for sensitive perception. This study reports an integrated, highly sensitive humidity sensors array based on large-area, uniform single-layer molybdenum disulfide with an ultraclean surface. Device mobilities and on/off ratios decrease linearly with the relative humidity varying from 0% to 35%, leading to a high sensitivity of more than 10 . The reversible water physisorption process leads to short response and decay times. In addition, the device array on a flexible substrate shows stable performance, suggesting great potential in future noncontact interface localization applications.

摘要

最近,二维材料由于几乎所有原子都在表面,因此在湿度感测应用中表现出巨大的潜力。因此,材料表面的质量成为敏感感知的关键。本研究报告了一种基于大面积、均匀单层二硫化钼的集成、高灵敏度湿度传感器阵列,其表面具有超高洁净度。器件迁移率和开/关比随相对湿度从 0%到 35%的线性变化而线性下降,导致超过 10 的高灵敏度。可逆的水物理吸附过程导致响应和衰减时间短。此外,柔性衬底上的器件阵列表现出稳定的性能,这表明其在未来非接触式接口定位应用中具有巨大的潜力。

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