Institute of Microelectronics, Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing, 100084, China.
Institute of Functional Nano & Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-based Functional Materials & Devices, Soochow University, Suzhou, 215123, Jiangsu Province, China.
Sci Rep. 2017 Jul 28;7(1):6751. doi: 10.1038/s41598-017-05967-w.
Single-walled carbon nanotubes (SWCNTs) offer great potential for field-effect transistors and integrated circuit applications due to their extraordinary electrical properties. To date, as-made SWCNT transistors are usually p-type in air, and it still remains challenging for realizing n-type devices. Herein, we present efficient and reversible electron doping of semiconductor-enriched single-walled carbon nanotubes (s-SWCNTs) by firstly utilizing decamethylcobaltocene (DMC) deposited by a simple spin-coating process at room temperature as an electron donor. A n-type transistor behavior with high on current, large I /I ratio and excellent uniformity is obtained by surface charge transfer from the electron donor DMC to acceptor s-SWCNTs, which is further corroborated by the Raman spectra and the ab initio simulation results. The DMC dopant molecules could be reversibly removed by immersion in N, N-Dimethylformamide solvent, indicating its reversibility and providing another way to control the carrier concentration effectively as well as selective removal of surface dopants on demand. Furthermore, the n-type behaviors including threshold voltage, on current, field-effect mobility, contact resistances, etc. are well controllable by adjusting the surface doping concentration. This work paves the way to explore and obtain high-performance n-type nanotubes for future complementary CMOS circuit and system applications.
单壁碳纳米管 (SWCNT) 由于其非凡的电学性能,在场效应晶体管和集成电路应用方面具有巨大的潜力。迄今为止,在空气中制造的 SWCNT 晶体管通常为 p 型,而实现 n 型器件仍然具有挑战性。在此,我们通过首先利用室温下简单旋涂工艺沉积的十甲基环戊二烯基钴 (DMC) 作为电子给体,实现了半导体富集单壁碳纳米管 (s-SWCNT) 的高效可逆电子掺杂。通过电子给体 DMC 到受体 s-SWCNT 的表面电荷转移,获得了具有高导通电流、大 I /I 比和优异均匀性的 n 型晶体管行为,这进一步得到了拉曼光谱和从头算模拟结果的证实。掺杂剂 DMC 分子可以通过浸入 N,N-二甲基甲酰胺溶剂中可逆地去除,这表明其具有可逆性,并提供了另一种有效控制载流子浓度和选择性按需去除表面掺杂剂的方法。此外,通过调整表面掺杂浓度,n 型行为(包括阈值电压、导通电流、场效应迁移率、接触电阻等)可以得到很好的控制。这项工作为探索和获得用于未来互补 CMOS 电路和系统应用的高性能 n 型纳米管铺平了道路。