Kim A A, Kustanovich K, Baratian D, Ainla A, Shaali M, Jeffries G D M, Jesorka A
Department of Chemistry and Chemical Engineering, Chalmers University of Technology, Göteborg 412 96, Sweden.
Biomicrofluidics. 2017 Feb 14;11(1):014112. doi: 10.1063/1.4975026. eCollection 2017 Jan.
We present a process for fabrication of free-standing SU-8 probes, with a dry, mechanical release of the final micro-devices. The process utilizes the thermal release tape, a commonly used cleanroom material, for facile heat-release from the sacrificial layer. For characterization of the SU-8 microfluidic probes, two liquid interfaces were designed: a disposable interface with integrated wells and an interface with external liquid reservoirs. The versatility of the fabrication and the release procedures was illustrated by further developing the process to functionalize the SU-8 probes for impedance sensing, by integrating metal thin-film electrodes. An additional interface scheme which contains electronic components for impedance measurements was developed. We investigated the possibilities of introducing perforations in the SU-8 device by photolithography, for solution sampling predominantly by diffusion. The SU-8 processes described here allow for a convenient batch production of versatile free-standing microfluidic devices with well-defined tip-geometry.
我们展示了一种制造独立式SU-8探针的工艺，通过干式机械方式释放最终的微器件。该工艺利用热释放胶带（一种常用的洁净室材料），以便从牺牲层轻松实现热释放。为了表征SU-8微流体探针，设计了两种液体界面：一种带有集成阱的一次性界面和一种带有外部液体储存器的界面。通过进一步改进工艺，将SU-8探针功能化以用于阻抗传感（通过集成金属薄膜电极），展示了制造和释放程序的通用性。还开发了一种包含用于阻抗测量的电子元件的附加界面方案。我们研究了通过光刻在SU-8器件中引入穿孔的可能性，主要用于通过扩散进行溶液采样。这里描述的SU-8工艺允许方便地批量生产具有明确尖端几何形状的通用独立式微流体器件。
