Low cost integration of 3D-electrode structures into microfluidic devices by replica molding.

We demonstrate a new replica molding method for integrating 3D-composite electrodes into microfluidic devices made from polydimethylsiloxane (PDMS) at low cost. Our process does not require work in a cleanroom, expensive materials, or expensive equipment once a micro mold has been fabricated using standard multilayer SU-8 photolithography. Different device geometries have been fabricated to demonstrate the capabilities and limitations of the method. The electrical properties of the composite electrode material are characterized. Furthermore, a device for concentrating particles via AC-dielectrophoresis is presented as an example for a potential application of the fabrication process.