CAS Key Laboratory of Nanosystem and Hierarchical Fabrication, CAS Center for Excellence in Nanoscience, National Center for Nanoscience and Technology, University of Chinese Academy of Sciences, Beijing, 100190, China.
School of Physics and Electronics, Shandong Normal University, Jinan, 250014, China.
Small. 2017 Oct;13(40). doi: 10.1002/smll.201701218. Epub 2017 Aug 21.
Suspended single-walled carbon nanotubes (SWNTs) have advantages in mechanical resonators and highly sensitive sensors. Large-scale fabrication of suspended SWNTs array devices and uniformity among SWNTs devices remain a great challenge. This study demonstrates an effective, fast, and wafer-scale technique to fabricate suspended SWNT arrays, which is based on a dynamic motion of silver liquid to suspend and align the SWNTs between the prefabricated palladium electrodes in high temperature annealing treatment. Suspended, strained, and aligned SWNTs are synthesized on a 2 × 2 cm substrate with an average density of 10 tubes per micrometer. Under the optimal conditions, almost all SWNTs become suspended. A promising formation model of suspended SWNTs is established. The Kelvin four-terminal resistance measurement shows that these SWNT array devices have extreme low contact resistance. Meanwhile, the suspended SWNT array field effect transistors are fabricated by selective etching of metallic SWNTs using electrical breakdown. This method of large-scale fabrication of suspended architectures pushes the study of nanoscale materials into a new stage related to the electrical physics and industrial applications.
悬浮单壁碳纳米管（SWNTs）在机械谐振器和高灵敏度传感器方面具有优势。然而，大规模制造悬浮 SWNTs 阵列器件以及实现 SWNTs 器件之间的均匀性仍然是一个巨大的挑战。本研究展示了一种基于银液在高温退火处理过程中的动态运动，从而能够有效地、快速地、晶圆级地制造悬浮 SWNT 阵列的技术。在该技术中，悬浮、拉伸和对齐的 SWNTs 会在 2×2cm 的衬底上合成，平均每微米有 10 根 SWNTs。在最优条件下，几乎所有的 SWNTs 都会被悬浮起来。建立了一个有前途的悬浮 SWNTs 形成模型。Kelvin 四端电阻测量表明，这些 SWNT 阵列器件具有极低的接触电阻。同时，通过使用电击穿选择性地刻蚀金属 SWNTs，制备了悬浮 SWNT 阵列场效应晶体管。这种大规模制造悬浮结构的方法将纳米材料的研究推向了一个与电物理和工业应用相关的新阶段。
