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基于氧化钛纳米管阵列的新型气体分析多传感器芯片。

Toward new gas-analytical multisensor chips based on titanium oxide nanotube array.

机构信息

Skolkovo Institute of Science and Technology, Skolkovo Innovation Center, 3 Nobel str., Moscow, Russian Federation.

V. A. Kotel'nikov Institute of RadioEngineering and Electronics of Russian Academy of Science, Saratov Branch, 38 Zelenaya str., Saratov, Russian Federation.

出版信息

Sci Rep. 2017 Aug 29;7(1):9732. doi: 10.1038/s41598-017-10495-8.

DOI:10.1038/s41598-017-10495-8
PMID:28852172
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5575241/
Abstract

Reliable environmental monitoring requires cost effective but highly sensitive and selective gas sensors. While the sensitivity of the sensors is improved by reducing the characteristic dimensions of the gas-sensing material, the selectivity is often approached by combining the sensors into multisensor arrays. The development of scalable methods to manufacture such arrays based on low-dimensional structures offers new perspectives for gas sensing applications. Here we examine an approach to produce multisensor array chips based on the TiO nanotube layers segmented by multiple Pt strip electrodes. We study the sensitivity and selectivity of the developed chip at operating temperatures up to 400 °C towards organic vapors in the ppm range. The results indicate that the titania nanotubes are a promising material platform for novel cost-effective and powerful gas-analytical multisensor units.

摘要

可靠的环境监测需要具有成本效益但又高度敏感和选择性的气体传感器。虽然通过减小气体敏感材料的特征尺寸可以提高传感器的灵敏度,但通过将传感器组合成多传感器阵列可以实现选择性。基于低维结构开发用于制造这种阵列的可扩展方法为气体传感应用提供了新的视角。在这里,我们研究了一种基于 TiO 纳米管层的方法,该方法通过多个 Pt 条电极分段,从而产生多传感器阵列芯片。我们研究了在高达 400°C 的工作温度下,针对 ppm 范围内的有机蒸气,开发的芯片的灵敏度和选择性。结果表明,二氧化钛纳米管是用于新型经济高效且功能强大的气体分析多传感器单元的有前途的材料平台。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/3cd230d0fc88/41598_2017_10495_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/f20992bd2723/41598_2017_10495_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/0865eb8d9f95/41598_2017_10495_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/e0ca65ac6346/41598_2017_10495_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/68b0010d4725/41598_2017_10495_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/3cd230d0fc88/41598_2017_10495_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/f20992bd2723/41598_2017_10495_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/0865eb8d9f95/41598_2017_10495_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/e0ca65ac6346/41598_2017_10495_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/68b0010d4725/41598_2017_10495_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1a55/5575241/3cd230d0fc88/41598_2017_10495_Fig5_HTML.jpg

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