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等离子体中垂直取向石墨烯生长的特定过程机制。

Process-specific mechanisms of vertically oriented graphene growth in plasmas.

作者信息

Ghosh Subrata, Polaki Shyamal R, Kumar Niranjan, Amirthapandian Sankarakumar, Kamruddin Mohamed, Ostrikov Kostya Ken

机构信息

Surface and Nanoscience Division, Materials Science Group, Indira Gandhi Centre for Atomic Research - Homi Bhabha National Institute, Kalpakkam - 603102, India.

Materials Physics Division, Materials Science Group, Indira Gandhi Centre for Atomic Research - Homi Bhabha National Institute, Kalpakkam - 603102, India.

出版信息

Beilstein J Nanotechnol. 2017 Aug 10;8:1658-1670. doi: 10.3762/bjnano.8.166. eCollection 2017.

Abstract

Applications of plasma-produced vertically oriented graphene nanosheets (VGNs) rely on their unique structure and morphology, which can be tuned by the process parameters to understand the growth mechanism. Here, we report on the effect of the key process parameters such as deposition temperature, discharge power and distance from plasma source to substrate on the catalyst-free growth of VGNs in microwave plasmas. A direct evidence for the initiation of vertical growth through nanoscale graphitic islands is obtained from the temperature-dependent growth rates where the activation energy is found to be as low as 0.57 eV. It is shown that the growth rate and the structural quality of the films could be enhanced by (a) increasing the substrate temperature, (b) decreasing the distance between the microwave plasma source and the substrate, and (c) increasing the discharge power. The correlation between the wetting characteristics, morphology and structural quality is established. It is also demonstrated that morphology, crystallinity, wettability and sheet resistance of the VGNs can be varied while maintaining the same sp content in the film. The effects of the substrate temperature and the electric field in vertical alignment of the graphene sheets are reported. These findings help to develop and optimize the process conditions to produce VGNs tailored for applications including sensing, field emission, catalysis and energy storage.

摘要

等离子体产生的垂直取向石墨烯纳米片(VGNs)的应用依赖于其独特的结构和形态,通过工艺参数对其进行调控有助于理解其生长机制。在此,我们报道了诸如沉积温度、放电功率以及等离子体源到衬底的距离等关键工艺参数对微波等离子体中VGNs无催化剂生长的影响。通过温度依赖的生长速率获得了通过纳米级石墨岛起始垂直生长的直接证据,其中发现活化能低至0.57电子伏特。结果表明,通过以下方式可以提高薄膜的生长速率和结构质量:(a)提高衬底温度;(b)减小微波等离子体源与衬底之间的距离;(c)提高放电功率。建立了润湿性、形态与结构质量之间的相关性。还证明了在保持薄膜中相同sp含量的同时,可以改变VGNs的形态、结晶度、润湿性和薄层电阻。报道了衬底温度和电场对石墨烯片垂直排列的影响。这些发现有助于开发和优化工艺条件,以生产适用于传感、场发射、催化和能量存储等应用的定制VGNs。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/9789/5564255/9b9a0e2b6e65/Beilstein_J_Nanotechnol-08-1658-g002.jpg

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