Liang Binghao, Chen Wenjun, He Zhongfu, Yang Rongliang, Lin Zhiqiang, Du Huiwei, Shang Yuanyuan, Cao Anyuan, Tang Zikang, Gui Xuchun
State Key Lab of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, P. R. China.
School of Physical Engineering, Zhengzhou University, Zhengzhou, Henan, 450052, China.
Small. 2017 Nov;13(44). doi: 10.1002/smll.201702422. Epub 2017 Sep 29.
Pressure sensing is a crucial function for flexible and wearable electronics, such as artificial skin and health monitoring. Recent progress in material and device structure of pressure sensors has brought breakthroughs in flexibility, self-healing, and sensitivity. However, the fabrication process of many pressure sensors is too complicated and difficult to integrate with traditional silicon-based Micro-Electro-Mechanical System(MEMS). Here, this study demonstrates a scalable and integratable contact resistance-based pressure sensor based on a carbon nanotube conductive network and a photoresist insulation layer. The pressure sensors have high sensitivity (95.5 kPa ), low sensing threshold (16 Pa), fast response speed (<16 ms), and zero power consumption when without loading pressure. The sensitivity, sensing threshold, and dynamic range are all tunable by conveniently modifying the hole diameter and thickness of insulation layer.
压力传感对于柔性可穿戴电子设备至关重要，例如人造皮肤和健康监测。压力传感器在材料和器件结构方面的最新进展在柔韧性、自修复性和灵敏度方面取得了突破。然而，许多压力传感器的制造工艺过于复杂，难以与传统的硅基微机电系统（MEMS）集成。在此，本研究展示了一种基于碳纳米管导电网络和光刻胶绝缘层的可扩展且可集成的基于接触电阻的压力传感器。该压力传感器具有高灵敏度（95.5 kPa）、低传感阈值（16 Pa）、快速响应速度（<16 ms），并且在无负载压力时功耗为零。通过方便地改变绝缘层的孔径和厚度，灵敏度、传感阈值和动态范围均可调。
