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基于微图案压阻式器件结构的可拉伸压力传感器的局部可控传感性能。

Locally Controlled Sensing Properties of Stretchable Pressure Sensors Enabled by Micro-Patterned Piezoresistive Device Architecture.

机构信息

Department of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06974, Korea.

School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, Korea.

出版信息

Sensors (Basel). 2020 Nov 18;20(22):6588. doi: 10.3390/s20226588.

Abstract

For wearable health monitoring systems and soft robotics, stretchable/flexible pressure sensors have continuously drawn attention owing to a wide range of potential applications such as the detection of human physiological and activity signals, and electronic skin (e-skin). Here, we demonstrated a highly stretchable pressure sensor using silver nanowires (AgNWs) and photo-patternable polyurethane acrylate (PUA). In particular, the characteristics of the pressure sensors could be moderately controlled through a micro-patterned hole structure in the PUA spacer and size-designs of the patterned hole area. With the structural-tuning strategies, adequate control of the site-specific sensitivity in the range of 4783 kPa and in the sensing range from 0.1 to 20 kPa was achieved. Moreover, stacked AgNW/PUA/AgNW (APA) structural designed pressure sensors with mixed hole sizes of 10/200 µm and spacer thickness of 800 µm exhibited high sensitivity (171.5 kPa) in the pressure sensing range of 020 kPa, fast response (100110 ms), and high stretchability (40%). From the results, we envision that the effective structural-tuning strategy capable of controlling the sensing properties of the APA pressure sensor would be employed in a large-area stretchable pressure sensor system, which needs site-specific sensing properties, providing monolithic implementation by simply arranging appropriate micro-patterned hole architectures.

摘要

对于可穿戴健康监测系统和软机器人,可拉伸/柔性压力传感器由于其广泛的潜在应用,如人体生理和活动信号的检测以及电子皮肤(e-skin),一直受到关注。在这里,我们使用银纳米线(AgNWs)和光可图案化的聚氨酯丙烯酸酯(PUA)展示了一种高可拉伸压力传感器。特别是,通过 PUA 间隔物中的微图案化孔结构和图案化孔区域的尺寸设计,可以适度控制压力传感器的特性。通过结构调整策略,可以在 4783 kPa 的范围内对特定位置的灵敏度进行适当控制,在 0.120 kPa 的传感范围内也可以实现这一效果。此外,堆叠的 AgNW/PUA/AgNW(APA)结构设计的压力传感器,具有 10/200 µm 的混合孔尺寸和 800 µm 的间隔物厚度,在 020 kPa 的压力传感范围内表现出高灵敏度(171.5 kPa)、快速响应(100~110 ms)和高拉伸性(40%)。从结果可以看出,我们设想的有效结构调整策略能够控制 APA 压力传感器的传感特性,将应用于需要特定位置传感特性的大面积可拉伸压力传感器系统中,通过简单地布置适当的微图案化孔结构,可以实现单片式实现。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2f75/7698782/7d4ef38c93e3/sensors-20-06588-g001.jpg

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