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MEMS振动陀螺仪敏感通道中的机电噪声

Mechanical and Electrical Noise in Sense Channel of MEMS Vibratory Gyroscopes.

作者信息

Ding Xukai, Jia Jia, Gao Yang, Li Hongsheng

机构信息

School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.

Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China.

出版信息

Sensors (Basel). 2017 Oct 11;17(10):2306. doi: 10.3390/s17102306.

DOI:10.3390/s17102306
PMID:29019955
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5677439/
Abstract

This paper presents a theoretical analysis of mechanical and electrical noise in the sense channel of micro-electromechanical systems (MEMS) vibratory gyroscopes. Closed-form expressions for the power spectral density (PSD) of the noise equivalent rate (NER) of gyroscopes in the open-loop and the force-rebalance operations are derived by using an averaged PSD model and an equivalent transfer function. The obtained expressions are verified through numerical simulations, demonstrating close agreements between the analytic and the numerical models. Based on the derived expressions for the PSD of the NER, the impacts of the modal frequency split, quality factor, and the gain of the feedback forcer, as well as the gain of the signal conditioning circuit, on the gyroscope noise characteristics are theoretically analyzed. In addition, the angle random walk (ARW) and the standard deviation of the NER are also discussed through the PSD models. Finally, the effects of the loop closing, the mode matching, and the gain of the feedback forcer on the PSD of the NER were verified via a MEMS vibratory gyroscope with a tunable modal frequency split.

摘要

本文对微机电系统（MEMS）振动陀螺仪传感通道中的机械噪声和电噪声进行了理论分析。通过使用平均功率谱密度（PSD）模型和等效传递函数，推导了开环和力平衡操作下陀螺仪噪声等效速率（NER）的功率谱密度（PSD）的闭式表达式。通过数值模拟验证了所得表达式，表明解析模型与数值模型之间具有密切的一致性。基于推导得到的NER的PSD表达式，从理论上分析了模态频率分裂、品质因数、反馈力发生器增益以及信号调理电路增益对陀螺仪噪声特性的影响。此外，还通过PSD模型讨论了角度随机游走（ARW）和NER的标准差。最后，通过具有可调模态频率分裂的MEMS振动陀螺仪验证了闭环、模式匹配和反馈力发生器增益对NER的PSD的影响。

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