带球盘转子的微陀螺仪低噪声接口专用集成电路

Low Noise Interface ASIC of Micro Gyroscope with Ball-disc Rotor.

作者信息

Ren Mingyuan, Xu Honghai, Han Xiaowei, Dong Changchun, Lu Xuebin

机构信息

School of Software and Microelectronics, Harbin University of Science and Technology, Harbin 150080, China.

School of Computer and Information Engineering, Harbin University of Commerce, Harbin 150028, China.

出版信息

Sensors (Basel). 2020 Feb 24;20(4):1238. doi: 10.3390/s20041238.

DOI:10.3390/s20041238

PMID:32102439

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7070746/

Abstract

A low noise interface ASIC for micro gyroscope with ball-disc rotor is realized in 0.5µm CMOS technology. The interface circuit utilizes a transimpedance pre-amplifier which reduces input noise. The proposed interface achieves 0.003 /s/Hz noise density and 0.003 /s sensitivity with ±100 /s measure range. The functionality of the full circuit, including circuit analysis, noise analysis and measurement results, has been demonstrated.

摘要

一款用于带有球盘转子的微陀螺仪的低噪声接口专用集成电路采用0.5μm互补金属氧化物半导体（CMOS）技术实现。该接口电路采用了一个降低输入噪声的跨阻前置放大器。所提出的接口在±100 /s的测量范围内实现了0.003 /s/Hz的噪声密度和0.003 /s的灵敏度。已经展示了整个电路的功能，包括电路分析、噪声分析和测量结果。