使用介孔SnO₂修饰层的高灵敏度和高选择性氢气传感器。

Highly Sensitive and Selective Hydrogen Gas Sensor Using the Mesoporous SnO₂ Modified Layers.

作者信息

Xue Niuzi, Zhang Qinyi, Zhang Shunping, Zong Pan, Yang Feng

机构信息

School of Material Science and Engineering, Wuhan University of Technology, Wuhan 430070, China.

Department of Materials Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.

出版信息

Sensors (Basel). 2017 Oct 14;17(10):2351. doi: 10.3390/s17102351.

DOI:10.3390/s17102351

PMID:29036898

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5677456/

Abstract

It is important to improve the sensitivities and selectivities of metal oxide semiconductor (MOS) gas sensors when they are used to monitor the state of hydrogen in aerospace industry and electronic field. In this paper, the ordered mesoporous SnO₂ (m-SnO₂) powders were prepared by sol-gel method, and the morphology and structure were characterized by X-ray diffraction analysis (XRD), transmission electron microscope (TEM) and Brunauer-Emmett-Teller (BET). The gas sensors were fabricated using m-SnO₂ as the modified layers on the surface of commercial SnO₂ (c-SnO₂) by screen printing technology, and tested for gas sensing towards ethanol, benzene and hydrogen with operating temperatures ranging from 200 °C to 400 °C. Higher sensitivity was achieved by using the modified m-SnO₂ layers on the c-SnO₂ gas sensor, and it was found that the S(c/m2) sensor exhibited the highest response (Ra/Rg = 22.2) to 1000 ppm hydrogen at 400 °C. In this paper, the mechanism of the sensitivity and selectivity improvement of the gas sensors is also discussed.

摘要

当金属氧化物半导体（MOS）气体传感器用于监测航空航天工业和电子领域中的氢气状态时，提高其灵敏度和选择性非常重要。本文采用溶胶-凝胶法制备了有序介孔SnO₂（m-SnO₂）粉末，并通过X射线衍射分析（XRD）、透射电子显微镜（TEM）和布鲁诺尔-埃米特-泰勒（BET）对其形貌和结构进行了表征。采用丝网印刷技术，以m-SnO₂作为商业SnO₂（c-SnO₂）表面的改性层制备了气体传感器，并在200℃至400℃的工作温度下对乙醇、苯和氢气进行了气敏测试。在c-SnO₂气体传感器上使用改性的m-SnO₂层实现了更高的灵敏度，发现在400℃时，S(c/m2)传感器对1000 ppm氢气表现出最高响应（Ra/Rg = 22.2）。本文还讨论了气体传感器灵敏度和选择性提高的机理。