Cardoza-Contreras Marlene N, Romo-Herrera José M, Ríos Luis A, García-Gutiérrez R, Zepeda T A, Contreras Oscar E
Centro de Nanociencias y Nanotecnología, Universidad Nacional Autónoma de México, Baja California 22800, Mexico.
Centro de Investigación Científica y de Educación Superior de Ensenada, Ensenada, Baja California 22860, Mexico.
Sensors (Basel). 2015 Dec 4;15(12):30539-44. doi: 10.3390/s151229816.
Low concentrations of hazardous gases are difficult to detect with common gas sensors. Using semiconductor nanostructures as a sensor element is an alternative. Single ZnO nanowire gas sensor devices were fabricated by manipulation and connection of a single nanowire into a four-electrode aluminum probe in situ in a dual-beam scanning electron microscope-focused ion beam with a manipulator and a gas injection system in/column. The electrical response of the manufactured devices shows response times up to 29 s for a 121 ppm of H₂ pulse, with a variation in the nanowire resistance appreciable at room temperature and at 373.15 K of approximately 8% and 14% respectively, showing that ZnO nanowires are good candidates to detect low concentrations of H₂.
低浓度的有害气体很难用普通气体传感器检测到。使用半导体纳米结构作为传感元件是一种替代方法。通过在配备有操纵器和气体注入系统的双束扫描电子显微镜聚焦离子束中,将单根纳米线原位操纵并连接到四电极铝探针中,制备了单根ZnO纳米线气体传感器装置。所制造器件的电响应显示,对于121 ppm的H₂脉冲,响应时间长达29秒,在室温下和373.15 K时,纳米线电阻的变化分别约为8%和14%,这表明ZnO纳米线是检测低浓度H₂的良好候选材料。