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采用腔串联的无光刻平面带通反射式滤色器

Lithography-Free Planar Band-Pass Reflective Color Filter Using A Series Connection of Cavities.

作者信息

Ghobadi Amir, Hajian Hodjat, Soydan Mahmut Can, Butun Bayram, Ozbay Ekmel

机构信息

NANOTAM - Nanotechnology Research Center, Bilkent University, Ankara, 06800, Turkey.

Department of Electrical and Electronics Engineering, Bilkent University, Ankara, 06800, Turkey.

出版信息

Sci Rep. 2019 Jan 22;9(1):290. doi: 10.1038/s41598-018-36540-8.

Abstract

In this article, a lithography-free multilayer based color filter is realized using a proper series connection of two cavities that shows relatively high efficiency, high color purity, and a wide view angle. The proposed structure is a metal-insulator-metal-insulator-semiconductor (MIMIS) design. To optimize the device performance, at the first step, transfer matrix method (TMM) modeling is utilized to find the right choices of materials for each layer. Simulations are carried out later on to optimize the geometries of the layers to obtain our desired colors. Finally, the optimized devices are fabricated and experimentally characterized to evaluate our modelling findings. The characterization results of the fabricated samples prove the successful formation of efficient and wide view angle color filters. Unlike previously reported FP based designs that act as a band-stop filter in reflection mode (absorbing a narrow frequency range and reflecting the rest of the spectrum), this design generates a specific color by reflecting a narrow spectral range and absorbing the rest of the spectrum. The findings of this work can be extended to other multilayer structures where an efficient connection of cavities in a tandem scheme can propose functionalities that cannot be realized with conventional FP resonators.

摘要

在本文中,通过两个腔的适当串联实现了一种无光刻的多层彩色滤光片,该滤光片具有相对较高的效率、高色纯度和宽视角。所提出的结构是一种金属 - 绝缘体 - 金属 - 绝缘体 - 半导体(MIMIS)设计。为了优化器件性能,第一步利用传输矩阵法(TMM)建模来为每一层找到合适的材料选择。随后进行模拟以优化各层的几何结构,从而获得我们期望的颜色。最后,制造出优化后的器件并进行实验表征,以评估我们的建模结果。所制造样品的表征结果证明成功形成了高效且宽视角的彩色滤光片。与先前报道的基于法布里 - 珀罗(FP)的设计不同,后者在反射模式下充当带阻滤波器(吸收窄频率范围并反射光谱的其余部分),本设计通过反射窄光谱范围并吸收光谱的其余部分来产生特定颜色。这项工作的发现可以扩展到其他多层结构,其中以串联方案有效连接腔可以提出传统FP谐振器无法实现的功能。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2425/6342952/0e4cec478cf6/41598_2018_36540_Fig1_HTML.jpg

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