Yeshua Talia, Layani Michael, Dekhter Rimma, Huebner Uwe, Magdassi Shlomo, Lewis Aaron
Department of Applied Physics, Selim and Rachel Benin School of Engineering and Computer Science, The Hebrew University, Givat Ram, Jerusalem, 9190401, Israel.
School of Materials Science and Engineering, Nanyang Technological University, Nanyang Avenue 50, 639798, Singapore.
Small. 2018 Jan;14(1). doi: 10.1002/smll.201702324. Epub 2017 Nov 14.
The field of printed electronics is continually trying to reduce the dimensions of the electrical components. Here, a method of printing metallic lines with widths as small as 15 nm and up to a few micrometers using fountain pen nanolithography (FPN) is shown. The FPN technique is based on a bent nanopipette with atomic force feedback that acts similar to a nanopen. The geometry of the nanopen allows for rapid placement accuracy of the printing tip, on any desired location, with the highest of optical sub-micrometer resolution. Using this nanopen, investigations of various inks are undertaken together with instrumental and script-tool development that allows accurate printing of multiple layers. This has led to the printing of conductive lines using inks composed of silver nanoparticles and salt solutions of silver and copper. In addition, it is shown that the method can be applied to substrates of various materials with minimal effect on the dimension of the line. The line widths are varied by using nanopens with different orifices or by tailoring the wetting properties of the ink on the substrate. Metallic interconnections of conducting lines are reported.
印刷电子领域一直在努力减小电子元件的尺寸。在此展示了一种使用喷泉笔纳米光刻技术（FPN）印刷宽度小至15纳米、长达几微米的金属线路的方法。FPN技术基于一种带有原子力反馈的弯曲纳米移液器，其作用类似于一支纳米笔。这种纳米笔的几何形状使得印刷尖端能够以最高的光学亚微米分辨率，在任何所需位置实现快速放置精度。使用这种纳米笔，对各种墨水进行了研究，并开展了仪器和脚本工具开发，从而能够精确印刷多层线路。这导致了使用由银纳米颗粒以及银和铜的盐溶液组成的墨水来印刷导线。此外，研究表明该方法可应用于各种材料的基板，且对线路尺寸的影响最小。通过使用具有不同孔径的纳米笔或调整墨水在基板上的润湿特性，可以改变线路宽度。文中还报道了导线的金属互连情况。
