Yu Zhiqiang, Shi Qing, Wang Huaping, Shang Junyi, Huang Qiang, Fukuda Toshio
Beijing Advanced Innovation Center for Intelligent Robots and Systems, School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, China.
Key Laboratory of Biomimetic Robots and Systems, Beijing Institute of Technology, Ministry of Education, Beijing 100081, China.
Micromachines (Basel). 2022 Jan 29;13(2):213. doi: 10.3390/mi13020213.
Nanointerconnection has been selected as a promising method in the post-Moore era to realize device miniaturization and integration. Even with many advances, the existing nanojoining methods still need further developments to meet the three-dimensional nanostructure construction requirements of the next-generation devices. Here, we proposed an efficient silver (Ag)-filled nanotube fabrication method and realized the controllable melting and ultrafine flow of the encapsulated silver at a subfemtogram (0.83 fg/s) level, which presents broad application prospects in the interconnection of materials in the nanometer or even subnanometer. We coated Ag nanowire with polyvinylpyrrolidone (PVP) to obtain core-shell nanostructures instead of the conventional well-established nanotube filling or direct synthesis technique, thus overcoming obstacles such as low filling rate, discontinuous metalcore, and limited filling length. Electromigration and thermal gradient force were figured out as the dominant forces for the controllable flow of molten silver. The conductive amorphous carbonaceous shell formed by pyrolyzing the insulative PVP layer was also verified by energy dispersive spectroscopy (EDS), which enabled the continued outflow of the internal Ag. Finally, a reconfigurable nanointerconnection experiment was implemented, which opens the way for interconnection error correction in the fabrication of nanoelectronic devices.
纳米互连已被选为后摩尔时代实现器件小型化和集成的一种有前景的方法。尽管取得了许多进展，但现有的纳米连接方法仍需进一步发展，以满足下一代器件的三维纳米结构构建要求。在此，我们提出了一种高效的填充银（Ag）纳米管制造方法，并在亚飞克（0.83 fg/s）水平上实现了封装银的可控熔化和超细流动，这在纳米甚至亚纳米材料的互连方面具有广阔的应用前景。我们用聚乙烯吡咯烷酮（PVP）包覆银纳米线以获得核壳纳米结构，而不是传统的成熟的纳米管填充或直接合成技术，从而克服了诸如填充率低、金属芯不连续和填充长度有限等障碍。电迁移和热梯度力被认为是熔融银可控流动的主导力量。通过能量色散光谱（EDS）也证实了由绝缘PVP层热解形成的导电非晶碳质壳，这使得内部的银能够持续流出。最后，实施了一个可重构的纳米互连实验，这为纳米电子器件制造中的互连误差校正开辟了道路。
