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采用一步光刻法的多电极可调液晶透镜

Multi-electrode tunable liquid crystal lenses with one lithography step.

作者信息

Beeckman Jeroen, Yang Tzu-Hsuan, Nys Inge, George John Puthenparampil, Lin Tsung-Hsien, Neyts Kristiaan

出版信息

Opt Lett. 2018 Jan 15;43(2):271-274. doi: 10.1364/OL.43.000271.

Abstract

Electrically tunable lenses offer the possibility to control the focal distance by applying an electric field. Different liquid crystal tunable lenses have been demonstrated. In order to minimize lens aberrations, multi-electrode designs allow us to fine-tune the applied voltages for every possible focal distance. In this Letter, we provide a novel multi-electrode design in which only one lithography step is necessary, thereby offering a greatly simplified fabrication procedure compared to earlier proposed designs. The key factor is the use of a high-permittivity layer, in combination with floating electrodes.

摘要

电可调透镜提供了通过施加电场来控制焦距的可能性。已经展示了不同的液晶可调透镜。为了使透镜像差最小化,多电极设计使我们能够针对每个可能的焦距微调所施加的电压。在本信函中,我们提供了一种新颖的多电极设计,该设计仅需一个光刻步骤,因此与早期提出的设计相比,大大简化了制造过程。关键因素是使用高介电常数层并结合浮动电极。

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