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一种用于大规模、无缝过渡金属二卤化物电子器件的化学合成通用方法。

A General Method for the Chemical Synthesis of Large-Scale, Seamless Transition Metal Dichalcogenide Electronics.

机构信息

CAS Key Laboratory for Biomedical Effects of Nanomaterials and Nanosafety, CAS Center for Excellence in Nanoscience, National Center for Nanoscience and Technology, Beijing, 100190, P. R. China.

University of Chinese Academy of Sciences, Beijing, 100049, P. R. China.

出版信息

Adv Mater. 2018 Mar;30(12):e1706215. doi: 10.1002/adma.201706215. Epub 2018 Jan 15.

Abstract

The capability to directly build atomically thin transition metal dichalcogenide (TMD) devices by chemical synthesis offers important opportunities to achieve large-scale electronics and optoelectronics with seamless interfaces. Here, a general approach for the chemical synthesis of a variety of TMD (e.g., MoS , WS , and MoSe ) device arrays over large areas is reported. During chemical vapor deposition, semiconducting TMD channels and metallic TMD/carbon nanotube (CNT) hybrid electrodes are simultaneously formed on CNT-patterned substrate, and then coalesce into seamless devices. Chemically synthesized TMD devices exhibit attractive electrical and mechanical properties. It is demonstrated that chemically synthesized MoS -MoS /CNT devices have Ohmic contacts between MoS /CNT hybrid electrodes and MoS channels. In addition, MoS -MoS /CNT devices show greatly enhanced mechanical stability and photoresponsivity compared with conventional gold-contacted devices, which makes them suitable for flexible optoelectronics. Accordingly, a highly flexible pixel array based on chemically synthesized MoS -MoS /CNT photodetectors is applied for image sensing.

摘要

通过化学合成直接构建原子级薄的过渡金属二硫属化物(TMD)器件为实现具有无缝接口的大规模电子学和光电学提供了重要机会。在此,报道了一种在大面积上化学合成多种 TMD(例如 MoS 、WS 和 MoSe )器件阵列的通用方法。在化学气相沉积过程中,半导体 TMD 沟道和金属 TMD/碳纳米管(CNT)杂化电极同时在 CNT 图案化衬底上形成,然后合并成无缝器件。化学合成的 TMD 器件表现出吸引人的电学和机械性能。结果表明,化学合成的 MoS -MoS /CNT 器件在 MoS /CNT 杂化电极和 MoS 沟道之间具有欧姆接触。此外,与传统的金接触器件相比,MoS -MoS /CNT 器件具有大大增强的机械稳定性和光电响应性,这使得它们适用于柔性光电。因此,基于化学合成的 MoS -MoS /CNT 光电探测器的高度灵活的像素阵列被应用于图像感应。

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