Djoumi Lyes, Vanotti Meddy, Blondeau-Patissier Virginie
Franche-Comté Electronics Mechanics Thermal Science and Optics - Sciences and Technologies Institute (FEMTO-ST), Time and Frequency Department, 26, Chemin de l'Epitaphe, 25030 Besançon, France.
Sensors (Basel). 2018 Jan 16;18(1):255. doi: 10.3390/s18010255.
In this research, Surface Acoustic Wave (SAW) sensors are combined with a cascade impactor to perform real time PM10 and PM2.5 mass concentration measurements. The SAW sensors consist of 125 MHz delay lines based on Love waves propagating on an AT-cut quartz substrate. The Love waves are guided on the substrate's surface using a silica layer. SAW sensors themselves are not capable to discriminate particles by their size, therefore, particle separation based on aerodynamic diameter is achieved using a 3 Lpm dedicated cascade impactor. The latter was designed to integrate the SAW sensors which are monitored using a phase shift measurement. The collected particles impact on the acoustic sensor's surface inducing a gravimetric effect that modifies the acoustic wave propagation conditions. The resulted phase shift allows the measurement of the mass deposited on the sensitive zone. The novel cascade impactor with SAW sensors as particle collecting stages is exposed to different aerosols in the 0-150 μg/m³ concentration range and proved to be able to detect and differentiate particles based on their size in real time. The system's response was compared to a commercial optical counter based on light scattering technology and was found to be in good agreement with it.
在本研究中,表面声波(SAW)传感器与级联冲击器相结合,用于实时测量PM10和PM2.5的质量浓度。SAW传感器由基于在AT切石英衬底上传播的乐甫波的125 MHz延迟线组成。乐甫波通过二氧化硅层在衬底表面上传播。SAW传感器本身无法按颗粒大小区分颗粒,因此,使用流量为3 Lpm的专用级联冲击器根据空气动力学直径实现颗粒分离。后者旨在集成通过相移测量进行监测的SAW传感器。收集到的颗粒撞击声学传感器表面,产生重量效应,从而改变声波传播条件。由此产生的相移可用于测量沉积在敏感区域的质量。这种以SAW传感器作为颗粒收集阶段的新型级联冲击器暴露于浓度范围为0 - 150μg/m³的不同气溶胶中,结果表明它能够实时检测并根据颗粒大小区分颗粒。该系统的响应与基于光散射技术的商用光学计数器进行了比较,发现两者吻合良好。