Kotelnikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, 125009 Moscow, Russia.
Gauze Institute of New Antibiotics, 119021 Moscow, Russia.
Sensors (Basel). 2023 Feb 16;23(4):2216. doi: 10.3390/s23042216.
A comparative analysis of the responses of two types of acoustic waves (surface SAW and plate APW) with close frequencies and the same type of waves (SAW) with different frequencies toward various liquid vapors (water, acetone, ethanol) was carried out in this paper. Two types of films based on mycelium of higher fungus (Curtis) P. Karst () prepared by various methods were used as sensitive coatings. These films were based on mycelium ethanolic (48% /) homogenizate (MEGl) and extract (EGl). A film deposition procedure compatible with acoustic devices technology was developed. Various piezoelectric substrates (YX-LiNbO, 128 YX-LiNbO) were used for appropriate acoustic delay lines production. It was found that additional SAW and APW attenuation associated with the appearance of mycelium films on the surface of the acoustic waveguide is two times greater for MEGL than for EGL films in the frequency range of 20-80 MHz The changes in acoustic wave amplitude and phase due to vapor absorption were measured and compared with each other, taking into account the differences in geometry of the samples. It was found that the phase response of the SAW delay lines with EGL films is three times higher than one with the presence of MEGL films for water and ethanol vapors. The films used are demonstrated good reproducibility and long-term stability for at least 2 months. Based on the results obtained, it was concluded that MEGl film is not appropriate for use in high frequency SAW delay lines as a sensitive coating. However, both types of the films (MEGl and EGl) could be used as sensitive coatings for low frequency SAW and APW sensors based on corresponding delay lines. Additionally, it was found that the films used are not sensitive to acetone vapor. As a result of the work carried out, a technique for creating sensitive films based on the mycelium of higher fungi compatible with the planar technology of acoustoelectronic delay lines was developed. The possibility of using such films for the development of gas SAW and APW sensors was shown.
本文对两种频率接近的声波(表面声表面波和板体声表面波)以及不同频率的同种声波(声表面波)对各种液体蒸气(水、丙酮、乙醇)的响应进行了比较分析。本文使用了两种基于高等真菌(Curtis)P. Karst()菌丝体制成的薄膜作为敏感涂层,这两种薄膜分别基于菌丝体乙醇(48%/)匀浆(MEGl)和提取物(EGl)。开发了一种与声器件技术兼容的薄膜沉积工艺。使用了各种压电基底(YX-LiNbO、128 YX-LiNbO)来制作合适的声延迟线。研究发现,在 20-80MHz 的频率范围内,与 EGl 薄膜相比,MEGl 薄膜在声导波表面形成时,额外的 SAW 和 APW 衰减要大两倍。测量并比较了由于蒸气吸收引起的声波幅度和相位的变化,同时考虑了样品几何形状的差异。研究发现,对于水和乙醇蒸气,具有 EGl 薄膜的 SAW 延迟线的相位响应比具有 MEGL 薄膜的延迟线高 3 倍。所使用的薄膜具有良好的可重复性和至少 2 个月的长期稳定性。基于所获得的结果,得出结论认为,对于高频 SAW 延迟线,MEGl 薄膜不适合用作敏感涂层。然而,对于基于相应延迟线的低频 SAW 和 APW 传感器,这两种类型的薄膜(MEGl 和 EGl)都可以用作敏感涂层。此外,研究发现,所使用的薄膜对丙酮蒸气不敏感。通过开展这项工作,开发了一种基于高等真菌菌丝体制备的与声电延迟线平面技术兼容的敏感薄膜制作技术。展示了此类薄膜在开发气体 SAW 和 APW 传感器方面的可能性。