Cheung Kin P, Veksler Dmitry, Campbell Jason P
Engineering Physics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899 USA.
IEEE Trans Electron Devices. 2017 Dec;64(12):5099-5016. doi: 10.1109/TED.2017.2764804. Epub 2017 Oct 30.
Charge-capture/emission is ubiquitous in electron devices. Its dynamics often play critical roles in device operation and reliability. Treatment of this basic process is found in many text books and is considered well understood. As in many electron device models, the individuality of immobile charge is commonly replaced with the average quantity of charge density. This has worked remarkably well when large numbers of individual charges (ensemble) are involved. As device geometries become very small, the ensemble "averaging" becomes far less accurate. In this work, the charge-capture/emission dynamic of Metal-Oxide-Semiconductor-Field-Effect-Transistor (MOSFET) is re-examined with full consideration of individual charges and the local field in their immediate vicinity. A dramatic modification of the local band diagram resulted, forcing a drastic change in emission mechanism. The implication is that many well-understood phenomena involving charge capture/emission will need to be reconsidered. As an example, this new picture is applied to the random telegraph noise (RTN) phenomenon. When the screening of a trapped charge by a polar medium such as SiO is quantitatively accounted for in this local field picture, a new physically sound RTN emission mechanism emerges. Similarly, the dynamics of post-stress recovery of Negative-Bias-Instability of p-channel MOSFET can be more rationally explained.
电荷俘获/发射在电子器件中无处不在。其动力学过程在器件运行和可靠性方面常常起着关键作用。许多教科书都对这一基本过程进行了阐述,并且认为大家对此已充分理解。与许多电子器件模型一样,固定电荷的个体特性通常被电荷密度的平均量所取代。当涉及大量单个电荷(总体)时,这种方法效果显著。随着器件几何尺寸变得非常小,总体“平均化”就变得远不够精确。在这项工作中,我们重新审视了金属氧化物半导体场效应晶体管(MOSFET)的电荷俘获/发射动力学,充分考虑了单个电荷及其紧邻区域的局部电场。这导致局部能带图发生了显著变化,进而迫使发射机制发生剧烈改变。这意味着许多涉及电荷俘获/发射的已被充分理解的现象需要重新考虑。例如,这一新观点被应用于随机电报噪声(RTN)现象。当在这个局部电场图景中定量考虑诸如SiO等极性介质对俘获电荷的屏蔽作用时,就会出现一种新的、物理上合理的RTN发射机制。同样,p沟道MOSFET负偏压不稳定性的应力后恢复动力学也能得到更合理的解释。