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无光刻接触和二维材料保存方法。

Via Method for Lithography Free Contact and Preservation of 2D Materials.

机构信息

Department of Physics, Columbia University , New York, New York 10027, United States.

Department of Mechanical Engineering, Columbia University , New York, New York 10027, United States.

出版信息

Nano Lett. 2018 Feb 14;18(2):1416-1420. doi: 10.1021/acs.nanolett.7b05161. Epub 2018 Feb 5.

Abstract

Atomically thin 2D materials span the common components of electronic circuits as metals, semiconductors, and insulators, and can manifest correlated phases such as superconductivity, charge density waves, and magnetism. An ongoing challenge in the field is to incorporate these 2D materials into multilayer heterostructures with robust electrical contacts while preventing disorder and degradation. In particular, preserving and studying air-sensitive 2D materials has presented a significant challenge since they readily oxidize under atmospheric conditions. We report a new technique for contacting 2D materials, in which metal via contacts are integrated into flakes of insulating hexagonal boron nitride, and then placed onto the desired conducting 2D layer, avoiding direct lithographic patterning onto the 2D conductor. The metal contacts are planar with the bottom surface of the boron nitride and form robust contacts to multiple 2D materials. These structures protect air-sensitive 2D materials for months with no degradation in performance. This via contact technique will provide the capability to produce "atomic printed circuit boards" that can form the basis of more complex multilayer heterostructures.

摘要

原子层状的二维材料涵盖了电子电路的常见组件,如金属、半导体和绝缘体,并且可以表现出相关的相,如超导性、电荷密度波和磁性。该领域的一个持续挑战是将这些二维材料纳入具有稳健电接触的多层异质结构,同时防止无序和退化。特别是,由于在大气条件下很容易氧化,因此保存和研究对空气敏感的二维材料提出了重大挑战。我们报告了一种接触二维材料的新技术,其中金属过孔接触被集成到绝缘六方氮化硼的薄片中,然后放置在所需的导电二维层上,避免直接在二维导体上进行光刻图案化。金属接触与氮化硼的底面齐平,并与多种二维材料形成坚固的接触。这些结构可以保护对空气敏感的二维材料数月而不会出现性能下降。这种过孔接触技术将提供制造“原子印刷电路板”的能力,这些电路板可以作为更复杂的多层异质结构的基础。

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