Dembele Vamara, Jin Moonseob, Choi Inho, Chegal Won, Kim Daesuk
Opt Express. 2018 Jan 22;26(2):1333-1341. doi: 10.1364/OE.26.001333.
We propose a snapshot spectroscopic ellipsometry and its applications for real-time thin-film thickness measurement. The proposed system employs an interferometric polarization-modulation module that can measure the spectroscopic ellipsometric phase for thin-film deposited on a substrate with a measurement speed of around 20 msec. It requires neither moving parts nor time dependent modulation devices. The accuracy of the proposed interferometric snapshot spectro-ellipsometer is analyzed through comparison with commercial equipment results.
