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激光辐照金属氧化物薄膜和纳米结构:应用与进展。

Laser Irradiation of Metal Oxide Films and Nanostructures: Applications and Advances.

机构信息

Functional Ceramics Group, Korea Institute of Materials Science (KIMS), Changwon, 51508, Republic of Korea.

Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea.

出版信息

Adv Mater. 2018 Apr;30(14):e1705148. doi: 10.1002/adma.201705148. Epub 2018 Feb 7.

Abstract

Recent technological advances in developing a diverse range of lasers have opened new avenues in material processing. Laser processing of materials involves their exposure to rapid and localized energy, which creates conditions of electronic and thermodynamic nonequilibrium. The laser-induced heat can be localized in space and time, enabling excellent control over the manipulation of materials. Metal oxides are of significant interest for applications ranging from microelectronics to medicine. Numerous studies have investigated the synthesis, manipulation, and patterning of metal oxide films and nanostructures. Besides providing a brief overview on the principles governing the laser-material interactions, here, the ongoing efforts in laser irradiation of metal oxide films and nanostructures for a variety of applications are reviewed. Latest advances in laser-assisted processing of metal oxides are summarized.

摘要

近年来,开发各种激光器的技术进步为材料处理开辟了新途径。材料的激光加工涉及到它们对快速和局部能量的暴露,这会产生电子和热力学非平衡的条件。激光诱导的热量可以在空间和时间上被局部化,从而能够对材料的操纵进行极好的控制。金属氧化物在从微电子学到医学的各种应用中都具有重要意义。许多研究都研究了金属氧化物薄膜和纳米结构的合成、操控和图案化。除了简要概述控制激光与材料相互作用的原理外,本文还综述了为各种应用而对金属氧化物薄膜和纳米结构进行激光辐照的研究现状。总结了激光辅助处理金属氧化物的最新进展。

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