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直接激光写入:从材料合成与转化到电子器件加工

Direct Laser Writing: From Materials Synthesis and Conversion to Electronic Device Processing.

作者信息

Pinheiro Tomás, Morais Maria, Silvestre Sara, Carlos Emanuel, Coelho João, Almeida Henrique V, Barquinha Pedro, Fortunato Elvira, Martins Rodrigo

机构信息

i3N|CENIMAT, Department of Materials Science, NOVA School of Science and Technology and CEMOP/UNINOVA, Campus de Caparica, Caparica, 2829-516, Portugal.

出版信息

Adv Mater. 2024 Jun;36(26):e2402014. doi: 10.1002/adma.202402014. Epub 2024 Apr 24.

Abstract

Direct Laser Writing (DLW) has been increasingly selected as a microfabrication route for efficient, cost-effective, high-resolution material synthesis and conversion. Concurrently, lasers participate in the patterning and assembly of functional geometries in several fields of application, of which electronics stand out. In this review, recent advances and strategies based on DLW for electronics microfabrication are surveyed and outlined, based on laser material growth strategies. First, the main DLW parameters influencing material synthesis and transformation mechanisms are summarized, aimed at selective, tailored writing of conductive and semiconducting materials. Additive and transformative DLW processing mechanisms are discussed, to open space to explore several categories of materials directly synthesized or transformed for electronics microfabrication. These include metallic conductors, metal oxides, transition metal chalcogenides and carbides, laser-induced graphene, and their mixtures. By accessing a wide range of material types, DLW-based electronic applications are explored, including processing components, energy harvesting and storage, sensing, and bioelectronics. The expanded capability of lasers to participate in multiple fabrication steps at different implementation levels, from material engineering to device processing, indicates their future applicability to next-generation electronics, where more accessible, green microfabrication approaches integrate lasers as comprehensive tools.

摘要

直接激光写入(DLW)已越来越多地被选作一种微加工途径,用于高效、经济高效且高分辨率的材料合成与转化。与此同时,激光参与了多个应用领域中功能几何结构的图案化和组装,其中电子领域尤为突出。在本综述中,基于激光材料生长策略,对基于DLW的电子微加工的最新进展和策略进行了调查和概述。首先,总结了影响材料合成和转变机制的主要DLW参数,旨在对导电和半导体材料进行选择性的定制写入。讨论了加法和转化式DLW加工机制,为探索直接合成或转化用于电子微加工的几类材料开辟空间。这些材料包括金属导体、金属氧化物、过渡金属硫族化物和碳化物、激光诱导石墨烯及其混合物。通过使用多种材料类型,探索了基于DLW的电子应用,包括加工组件、能量收集与存储、传感和生物电子学。激光在从材料工程到器件加工的不同实施层面参与多个制造步骤的扩展能力,表明了它们在下一代电子学中的未来适用性,在下一代电子学中,更易实现的绿色微加工方法将激光作为综合工具加以整合。

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