Bang Kyuhyun, Chee Sang-Soo, Kim Kangmi, Son Myungwoo, Jang Hanbyeol, Lee Byoung Hun, Baik Kwang Hyeon, Myoung Jae-Min, Ham Moon-Ho
1Department of Materials Science and Engineering, Yonsei University, Seoul, 03722 Republic of Korea.
2School of Materials Science and Engineering, Gwangju Institute of Science and Technology, Gwangju, 61005 Republic of Korea.
Nano Converg. 2018;5(1):7. doi: 10.1186/s40580-018-0139-0. Epub 2018 Mar 15.
There has been growing interest in developing nanoelectronic devices based on graphene because of its superior electrical properties. In particular, patterning graphene into a nanoribbon can open a bandgap that can be tuned by changing the ribbon width, imparting semiconducting properties. In this study, we report the effect of ribbon width on electrical transport properties of graphene nanoribbons (GNRs). Monolayer graphene sheets and Si nanowires (NWs) were prepared by chemical vapor deposition and a combination of nanosphere lithography and metal-assisted electroless etching from a Si wafer, respectively. Back-gated GNR field-effect transistors were fabricated on a heavily p-doped Si substrate coated with a 300 nm-thick SiO layer, by O reactive ion etching of graphene sheets using etch masks based on Si NWs aligned on the graphene between the two electrodes by a dielectrophoresis method. This resulted in GNRs with various widths in a highly controllable manner, where the on/off current ratio was inversely proportional to ribbon width. The field-effect mobility decreased with decreasing GNR widths due to carrier scattering at the GNR edges. These results demonstrate the formation of a bandgap in GNRs due to enhanced carrier confinement in the transverse direction and edge effects when the GNR width is reduced.
由于石墨烯具有优异的电学性能,人们对基于石墨烯开发纳米电子器件的兴趣与日俱增。特别是,将石墨烯图案化为纳米带可以打开一个能隙,该能隙可通过改变带的宽度来调节,从而赋予其半导体特性。在本研究中,我们报告了带宽度对石墨烯纳米带(GNRs)电输运性质的影响。单层石墨烯片和硅纳米线(NWs)分别通过化学气相沉积以及从硅片通过纳米球光刻和金属辅助化学蚀刻相结合的方法制备。背栅GNR场效应晶体管是在涂覆有300nm厚SiO层的重p掺杂硅衬底上制造的,通过使用基于通过介电泳方法排列在两个电极之间的石墨烯上的硅纳米线的蚀刻掩模对石墨烯片进行O反应离子蚀刻。这以高度可控的方式产生了具有各种宽度的GNRs,其中开/关电流比与带宽度成反比。由于在GNR边缘处的载流子散射,场效应迁移率随着GNR宽度的减小而降低。这些结果表明,当GNR宽度减小时,由于在横向方向上增强的载流子限制和边缘效应,在GNRs中形成了能隙。