State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China; National Institute of Metrology, Beijing 100029, China.
National Institute of Metrology, Beijing 100029, China.
Ultramicroscopy. 2018 Jul;190:77-80. doi: 10.1016/j.ultramic.2018.03.020. Epub 2018 Mar 28.
An atomic force microscopy (AFM) scanning head is designed with the probe orthogonal scanning mode for metrological AFM to eliminate the curvature distortion. The AFM probe is driven by piezostage and the scanning trajectory of the probe in 3 directions are orthogonal to reduce the cross coupling. A new optical lever amplification optical path is developed to eliminate the coupling error. The tracing lens and probe tip are moved as an integrated part. The AFM is operated at contacting mode. The step approach process of the probe tip is tested to the sample surface and the noise of the AFM head is analyzed. The response of the probe demonstrates a 0.5 nm resolution of the probe head in the z direction. Finally, the planar scanning performance of the scanning head is demonstrated compared with tube scanning AFM.
设计了一种原子力显微镜（AFM）扫描头，采用探针正交扫描模式，用于计量 AFM 以消除曲率变形。AFM 探针由压电器件驱动，探针在 3 个方向上的扫描轨迹相互正交，以减少交叉耦合。开发了一种新的光学杠杆放大光路来消除耦合误差。跟踪透镜和探针尖端作为一个整体移动。AFM 以接触模式运行。测试了探针尖端对样品表面的步进接近过程，并分析了 AFM 头的噪声。探针的响应表明探针头在 z 方向上的分辨率为 0.5nm。最后，与管扫描 AFM 相比，展示了扫描头的平面扫描性能。
