Carlos Emanuel, Kiazadeh Asal, Deuermeier Jonas, Branquinho Rita, Martins Rodrigo, Fortunato Elvira
CENIMAT/i3N Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia (FCT), Universidade NOVA de Lisboa (UNL), and CEMOP/UNINOVA, 2829-516 Caparica, Portugal.
Nanotechnology. 2018 Aug 24;29(34):345206. doi: 10.1088/1361-6528/aac9fb. Epub 2018 Jun 4.
Lately, resistive switching memories (ReRAM) have been attracting a lot of attention due to their possibilities of fast operation, lower power consumption and simple fabrication process and they can also be scaled to very small dimensions. However, most of these ReRAM are produced by physical methods and nowadays the industry demands more simplicity, typically associated with low cost manufacturing. As such, ReRAMs in this work are developed from a solution-based aluminum oxide (AlO) using a simple combustion synthesis process. The device performance is optimized by two-stage deposition of the AlO film. The resistive switching properties of the bilayer devices are reproducible with a yield of 100%. The ReRAM devices show unipolar resistive switching behavior with good endurance and retention time up to 10 s at 85 °C. The devices can be programmed in a multi-level cell operation mode by application of different reset voltages. Temperature analysis of various resistance states reveals a filamentary nature based on the oxygen vacancies. The optimized film was stacked between ITO and indium zinc oxide, targeting a fully transparent device for applications on transparent system-on-panel technology.
近来,电阻式开关存储器(ReRAM)因其具备快速运行、低功耗以及简单制造工艺的可能性而备受关注,并且它们还能够缩小至非常小的尺寸。然而,这些ReRAM大多是通过物理方法制造的,而如今业界要求更高的简易性,这通常与低成本制造相关。因此,本工作中的ReRAM是采用简单的燃烧合成工艺由基于溶液的氧化铝(AlO)制成的。通过AlO薄膜的两步沉积来优化器件性能。双层器件的电阻开关特性具有可重复性,良品率达100%。ReRAM器件呈现出单极电阻开关行为,在85°C下具有良好的耐久性和长达10秒的保持时间。通过施加不同的复位电压,器件可在多级单元操作模式下进行编程。对各种电阻状态的温度分析揭示了基于氧空位的丝状特性。将优化后的薄膜堆叠在ITO和铟锌氧化物之间,目标是制造一种用于透明面板系统技术应用的全透明器件。