School of Materials Science and Engineering , Nanjing University of Science and Technology , Nanjing 210094 , China.
Institute for Advanced Materials, South China Academy of Advanced Optoelectronics, and Key Laboratory of Quantum Engineering and Quantum Materials , South China Normal University , Guangzhou 510006 , China.
ACS Appl Mater Interfaces. 2018 Jun 27;10(25):21428-21433. doi: 10.1021/acsami.8b04781. Epub 2018 Jun 13.
Flexible, fatigue-free, large-scale, and nonvolatile memory is an emerging technological goal in a variety of fields, including electronic skins, wearable devices, and other flexible electronics. Perovskite oxide films deposited on rigid substrates (e.g., Si and SrTiO) at 500-700 °C and >1.0 Pa oxygen ambience have been widely used in electronic industries. However, their applications in flexible electronics are challenging, if not impossible. Here, the BiLaTiO ferroelectric films with SrRuO or Pt electrodes were prepared on the two-dimensional mica substrates, and then the flexible Pt/SrRuO/BiLaTiO/Pt memories have been achieved through reducing the mica to ∼10 μm thickness. These memories show the saturated polarization of P ∼ 20 μC/cm, and either the <1% bending strain or a normal light illumination hardly overcomes the potential barrier among different polarizations which originate from the noncentral symmetry of the atomic structure. As a result, they can undergo 10 write/erase cycles and/or 10000 times bending with 1.4 mm in radius without any fatigue or damage. Furthermore, they can withstand the operation at 20-200 °C or under light illumination. In short, these flexible oxide memories provide comprehensive performance for industrial applications.
灵活、无疲劳、大规模和非易失性存储器是电子皮肤、可穿戴设备和其他柔性电子等各种领域的新兴技术目标。在 500-700°C 和>1.0 Pa 氧气环境下,沉积在刚性衬底(例如 Si 和 SrTiO)上的钙钛矿氧化物薄膜已广泛应用于电子工业。然而,如果不是不可能,它们在柔性电子产品中的应用是具有挑战性的。在这里,在二维云母衬底上制备了具有 SrRuO 或 Pt 电极的 BiLaTiO 铁电薄膜,然后通过将云母减薄至约 10μm 的厚度,实现了柔性 Pt/SrRuO/BiLaTiO/Pt 存储器。这些存储器表现出饱和极化 P∼20μC/cm,无论是<1%的弯曲应变还是正常的光照射,都几乎无法克服源于原子结构非中心对称的不同极化之间的势垒。因此,它们可以在 1.4mm 半径下进行 10 次写入/擦除循环和/或 10000 次弯曲,而不会出现任何疲劳或损坏。此外,它们可以在 20-200°C 或光照下运行。总之,这些柔性氧化物存储器为工业应用提供了全面的性能。