Photonics Research Centre, Department of Electronic and Information Engineering, The Hong Kong Polytechnic University, Hong Kong, China.
Photonics Research Centre, Department of Electrical Engineering, The Hong Kong Polytechnic University, Hong Kong, China.
Sensors (Basel). 2018 Jun 5;18(6):1825. doi: 10.3390/s18061825.
Miniature optical fiber-tip sensors based on directly µ-printed polymer suspended-microbeams are presented. With an in-house optical 3D μ-printing technology, SU-8 suspended-microbeams are fabricated in situ to form Fabry⁻Pérot (FP) micro-interferometers on the end face of standard single-mode optical fiber. Optical reflection spectra of the fabricated FP micro-interferometers are measured and fast Fourier transform is applied to analyze the cavity of micro-interferometers. The applications of the optical fiber-tip sensors for refractive index (RI) sensing and pressure sensing, which showed 917.3 nm/RIU to RI change and 4.29 nm/MPa to pressure change, respectively, are demonstrated in the experiments. The sensors and their optical µ-printing method unveil a new strategy to integrate complicated microcomponents on optical fibers toward 'lab-on-fiber' devices and applications.
提出了一种基于直接微打印聚合物悬浮微梁的微型光纤尖端传感器。采用内部光学 3D 微打印技术，在标准单模光纤端面上原位制作 SU-8 悬浮微梁，形成法布里-珀罗（FP）微干涉仪。测量了所制作的 FP 微干涉仪的光学反射光谱，并应用快速傅里叶变换分析了微干涉仪的腔。实验中展示了光纤尖端传感器在折射率（RI）传感和压力传感方面的应用，其 RI 变化的灵敏度分别为 917.3nm/RIU 和压力变化的灵敏度为 4.29nm/MPa。这些传感器及其光学微打印方法为将复杂的微组件集成到光纤上以实现“光纤上的实验室”设备和应用提供了一种新策略。
