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用于柔性微系统和电子产品的聚二甲基硅氧烷(PDMS)上可挤压和可拉伸的薄金属膜中的破裂效应。

Cracking effects in squashable and stretchable thin metal films on PDMS for flexible microsystems and electronics.

作者信息

Baëtens Tiffany, Pallecchi Emiliano, Thomy Vincent, Arscott Steve

机构信息

Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN), CNRS, The University of Lille, Cité Scientifique, 59652, Villeneuve d'Ascq, France.

出版信息

Sci Rep. 2018 Jun 22;8(1):9492. doi: 10.1038/s41598-018-27798-z.

Abstract

Here, we study cracking of nanometre and sub-nanometre-thick metal lines (titanium, nickel, chromium, and gold) evaporated onto commercial polydimethylsiloxane (PDMS) substrates. Mechanical and electromechanical testing reveals potentially technologically useful effects by harnessing cracking. When the thin film metal lines are subjected to uniaxial longitudinal stretching, strain-induced cracks develop in the film. The regularity of the cracking is seen to depend on the applied longitudinal strain and film thickness-the findings suggest ordering and the possibility of creating metal mesas on flexible substrates without the necessity of lithography and etching. When the metal lines are aligned transversally to the direction of the applied strain, a Poisson effect-induced electrical 'self-healing' can be observed in the films. The Poisson effect causes process-induced cracks to short circuit, resulting in the lines being electrically conducting up to very high strains (~40%). Finally, cracking results in the observation of an enhanced transversal gauge factor which is ~50 times larger than the geometric gauge factor for continuous metal films-suggesting the possibility of high-sensitivity thin-film metal strain gauge flexible technology working up to high strains.

摘要

在此,我们研究了蒸发在商用聚二甲基硅氧烷(PDMS)衬底上的纳米级和亚纳米级厚金属线(钛、镍、铬和金)的开裂情况。机械和机电测试揭示了利用开裂可能产生的对技术有用的效果。当薄膜金属线受到单轴纵向拉伸时,薄膜中会产生应变诱导裂纹。可以看出,开裂的规律性取决于所施加的纵向应变和薄膜厚度——这些发现表明存在有序性,并且有可能在柔性衬底上创建金属台面,而无需光刻和蚀刻。当金属线与所施加应变的方向横向对齐时,在薄膜中可以观察到泊松效应诱导的电“自愈合”现象。泊松效应导致工艺诱导的裂纹短路,从而使金属线在高达非常高的应变(约40%)时仍保持导电。最后,开裂导致观察到增强的横向应变系数,该系数比连续金属薄膜的几何应变系数大~50倍——这表明存在高灵敏度薄膜金属应变计柔性技术在高应变下工作的可能性。

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