Li Kenan, Jacobsen Chris
Applied Physics, Northwestern University, Evanston, IL 60208, USA.
Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, USA.
J Synchrotron Radiat. 2018 Jul 1;25(Pt 4):1048-1059. doi: 10.1107/S1600577518007208. Epub 2018 Jun 17.
Fresnel zone plates used for X-ray nanofocusing face high-aspect-ratio nanofabrication challenges in combining narrow transverse features (for high spatial resolution) along with extended optical modulation along the X-ray beam direction (to improve efficiency). The stacking of multiple Fresnel zone plates along the beam direction has already been shown to offer improved characteristics of resolution and efficiency when compared with thin single zone plates. Using multislice wave propagation simulation methods, here a number of new schemes for the stacking of multiple Fresnel zone plates are considered. These include consideration of optimal thickness and spacing in the axial direction, and methods to capture a fraction of the light otherwise diffracted into unwanted orders, and instead bring it into the desired first-order focus. The alignment tolerances for stacking multiple Fresnel zone plates are also considered.
用于X射线纳米聚焦的菲涅耳波带片在将窄横向特征（用于高空间分辨率）与沿X射线束方向的扩展光学调制（以提高效率）相结合时面临高纵横比纳米制造挑战。与薄的单波带片相比，沿光束方向堆叠多个菲涅耳波带片已被证明能提供更好的分辨率和效率特性。本文使用多切片波传播模拟方法，考虑了多种用于堆叠多个菲涅耳波带片的新方案。这些方案包括考虑轴向的最佳厚度和间距，以及捕获原本衍射到不需要级次的一部分光并将其引入所需的一阶焦点的方法。还考虑了堆叠多个菲涅耳波带片的对准公差。
