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一种新型的基于实验室的硬X射线光电子能谱系统。

A novel laboratory-based hard X-ray photoelectron spectroscopy system.

作者信息

Regoutz Anna, Mascheck Manfred, Wiell Tomas, Eriksson Susanna K, Liljenberg Cristopher, Tetzner Kornelius, Williamson Benjamin A D, Scanlon David O, Palmgren Paul

机构信息

Department of Materials, Imperial College London, Exhibition Road, London SW7 2AZ, United Kingdom.

Scienta Omicron GmbH, Limburger Strasse 75, 65232 Taunusstein, Germany.

出版信息

Rev Sci Instrum. 2018 Jul;89(7):073105. doi: 10.1063/1.5039829.

DOI:10.1063/1.5039829
PMID:30068129
Abstract

Hard X-ray photoelectron spectroscopy (HAXPES) has seen continuous development since the first experiments in the 1970s. HAXPES systems are predominantly located at synchrotron sources due to low photoionization cross sections necessitating high X-ray intensities, which limits the technique's availability to a wide range of users and potential applications. Here, a new laboratory-based instrument capable of delivering monochromated X-rays with an energy of 9.25 keV and a microfocused 30 × 45 μm X-ray spot is introduced. The system gives an excellent energy resolution of below 500 meV coupled with good X-ray intensity. It allows stable measurements under grazing incidence conditions to maximise signal intensities. This article outlines the instrument behavior, showcases applications including bulk and multilayer measurements, and describes the overall performance of the spectrometer. This system presents an alternative to synchrotron-based experimental end stations and will help expand the number and range of HAXPES experiments performed in the future.

摘要

自20世纪70年代首次进行实验以来,硬X射线光电子能谱(HAXPES)一直在不断发展。由于光致电离截面较低,需要高X射线强度,HAXPES系统主要位于同步加速器源处,这限制了该技术对广泛用户和潜在应用的可用性。在此,介绍一种新型的基于实验室的仪器,该仪器能够提供能量为9.25 keV的单色X射线以及尺寸为30×45μm的微聚焦X射线光斑。该系统具有低于500 meV的出色能量分辨率以及良好的X射线强度。它允许在掠入射条件下进行稳定测量,以最大化信号强度。本文概述了该仪器的性能,展示了包括体材料和多层膜测量在内的应用,并描述了光谱仪的整体性能。该系统为基于同步加速器的实验终端站提供了一种替代方案,并将有助于扩大未来进行的HAXPES实验的数量和范围。

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