Juvert Joan, Cassese Tommaso, Uvin Sarah, de Groote Andreas, Snyder Brad, Bogaerts Lieve, Jamieson Geraldine, Van Campenhout Joris, Roelkens Günther, Van Thourhout Dries
Opt Express. 2018 Aug 20;26(17):21443-21454. doi: 10.1364/OE.26.021443.
We report on the heterogeneous integration of electrically pumped InP Fabry-Pérot lasers on a SOI photonic integrated circuit by transfer printing. Transfer printing is a promising micromanipulation technique that allows the heterogeneous integration of optical and electronic components realized on their native substrate onto a target substrate with efficient use of the source material, in a way that can be scaled to parallel manipulation and that allows mixing components from different sources onto the same target. We pre-process transfer printable etched facet Fabry-Pérot lasers on their native InP substrate, transfer print them into a trench defined in an SOI photonic chip and post-process the printed lasers on the target substrate. The laser facet is successfully butt-coupled to the photonic circuit using a silicon inverse taper based spot size converter. Milliwatt optical output power coupled to the Si waveguide circuit at 100 mA is demonstrated.
我们报告了通过转移印刷将电泵浦磷化铟(InP)法布里-珀罗激光器异质集成到硅基绝缘体上硅(SOI)光子集成电路上的情况。转移印刷是一种很有前景的微操纵技术,它能够将在其原生衬底上实现的光学和电子元件高效地异质集成到目标衬底上,其方式可扩展到并行操纵,并且允许将来自不同源的元件混合到同一目标上。我们在其原生InP衬底上对可转移印刷的蚀刻面法布里-珀罗激光器进行预处理,将它们转移印刷到SOI光子芯片中定义的沟槽内,并在目标衬底上对印刷后的激光器进行后处理。使用基于硅反向锥度的光斑尺寸转换器,激光面成功地与光子电路对接耦合。展示了在100毫安电流下耦合到硅波导电路的毫瓦级光输出功率。