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氧化物半导体薄膜与具有大可逆和非易失性电子性能调制的弛豫铁电单晶的集成。

Integration of Oxide Semiconductor Thin Films with Relaxor-Based Ferroelectric Single Crystals with Large Reversible and Nonvolatile Modulation of Electronic Properties.

机构信息

State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics , Chinese Academy of Sciences , Shanghai 200050 , China.

University of Chinese Academy of Sciences , Beijing 100049 , China.

出版信息

ACS Appl Mater Interfaces. 2018 Sep 26;10(38):32809-32817. doi: 10.1021/acsami.8b09170. Epub 2018 Sep 12.

Abstract

We report the fabrication of 0.71Pb(MgNb)O-0.29PbTiO (PMN-0.29PT)-based ferroelectric field effect transistors (FeFETs) by the epitaxial growth of cobalt-doped tin dioxide (SnO) semiconductor thin films on PMN-0.29PT single crystals. Using such FeFETs we realized in situ, reversible, and nonvolatile manipulation of the electron carrier density and achieved a large nonvolatile modulation of the resistance (∼330%) of the SnO:Co films through the polarization switching of PMN-0.29PT at 300 K. Particularly, combining the ferroelectric gating with piezoresponse force microscopy, X-ray diffraction, Hall effect, and magnetoresistance (MR), we rigorously disclose that both sign and magnitude of the MR are intrinsically determined by the electron carrier density, which could modify the s-d exchange interaction of the SnO:Co films. Furthermore, we realized multilevel resistance states of the SnO:Co films by combining the ferroelectric gating with ultraviolet light illumination, demonstrating that the FeFETs have potential applications in multistate resistive memories and electro-optical devices.

摘要

我们通过在 PMN-0.29PT 单晶上外延生长钴掺杂氧化锡(SnO)半导体薄膜,制备了 0.71Pb(MgNb)O-0.29PbTiO(PMN-0.29PT)基铁电场效应晶体管(FeFET)。我们利用这种 FeFET 实现了电子载流子密度的原位、可逆和非易失性调控,并通过 PMN-0.29PT 在 300 K 下的极化开关,实现了 SnO:Co 薄膜的大非易失性电阻调制(约 330%)。特别是,通过铁电门控与压电力显微镜、X 射线衍射、霍尔效应和磁阻(MR)相结合,我们严格揭示了 MR 的符号和大小本质上由电子载流子密度决定,这可以改变 SnO:Co 薄膜的 s-d 交换相互作用。此外,我们通过将铁电门控与紫外光照射相结合,实现了 SnO:Co 薄膜的多级电阻状态,表明 FeFET 在多态电阻存储器和电光器件中具有潜在应用。

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