State Key Laboratory of Mesoscopic Physics and Department of Physics, Peking University, Beijing 100871, P. R. China.
Phys Chem Chem Phys. 2018 Oct 3;20(38):24641-24651. doi: 10.1039/c8cp04615h.
Owing to their few lateral dangling bonds and enhanced gate electrostatics, two-dimensional semiconductors have attracted much attention for the fabrication of channels in next-generation field-effect transistors (FETs). Herein, combining first-principle band structure calculations with more precise quantum transport simulations, we systematically explore the interface properties between monolayer (ML) indium selenide (InSe) and a sequence of common electrodes in an FET. The ML InSe band structure is damaged by Sc, Au, Cr, Pt, and Pd electrodes but identifiable in contact with Ag, Cu, In, graphene and ML O-terminated Cr2C electrodes. A lateral n-type Schottky contact is generated with Sc, Au, Cr, Pt, Pd, and ML graphene electrodes owing to Fermi level pinning originating from the metal-induced gap states, which feature a pinning factor of 0.32. Luckily, a highly desirable lateral n-type Ohmic contact is generated with the Ag, Cu, and In electrodes. The calculated contact polarity is in agreement with the available experimental results using Au, Cr, ML graphene, Ag, and In as electrodes. Remarkably, a lateral p-type Schottky contact is generated with ML O-terminated Cr2C despite the very high work function of ML InSe. Therefore, this study offers a deeper understanding of ML InSe device interfaces and instructions for the design of ML InSe transistors.
由于二维半导体具有较少的悬键和增强的栅极静电,因此它们在制造下一代场效应晶体管 (FET) 的沟道方面引起了广泛关注。在此,我们通过第一性原理能带结构计算和更精确的量子输运模拟相结合,系统地研究了 FET 中单层 (ML) 硒化铟与一系列常见电极之间的界面特性。ML InSe 的能带结构会被 Sc、Au、Cr、Pt 和 Pd 电极破坏,但与 Ag、Cu、In、石墨烯和 ML O 终止的 Cr2C 电极接触时仍可识别。由于金属诱导的能隙态导致费米能级钉扎,Sc、Au、Cr、Pt、Pd 和 ML 石墨烯电极产生了横向 n 型肖特基接触,其钉扎因子为 0.32。幸运的是,Ag、Cu 和 In 电极产生了理想的横向 n 型欧姆接触。计算出的接触极性与使用 Au、Cr、ML 石墨烯、Ag 和 In 作为电极的可用实验结果一致。值得注意的是,尽管 ML InSe 的功函数非常高,但 ML O 终止的 Cr2C 仍会产生横向 p 型肖特基接触。因此,这项研究为 ML InSe 器件界面提供了更深入的了解,并为 ML InSe 晶体管的设计提供了指导。