Department of Chemistry , Oregon State University , 153 Gilbert Hall , Corvallis , Oregon 97331-4003 , United States.
School of Electrical Engineering and Computer Science , Oregon State University , Corvallis , Oregon 97331-5501 , United States.
ACS Appl Mater Interfaces. 2018 Oct 24;10(42):36082-36087. doi: 10.1021/acsami.8b08986. Epub 2018 Oct 15.
The production of high-quality thin-film insulators is essential to develop advanced technologies based on electron tunneling. Current insulator deposition methods, however, suffer from a variety of limitations, including constrained substrate sizes, limited materials options, and complexity of patterning. Here, we report the deposition of large-area AlO films by a solution process and its integration in metal-insulator-metal devices that exhibit I- V signatures of Fowler-Nordheim electron tunneling. A unique, high-purity precursor based on an aqueous solution of the nanocluster flat-Al transforms to thin AlO insulators free of the electron traps and emission states that commonly inhibit tunneling in other films. Tunneling is further confirmed by the temperature independence of device current.
制备高质量的薄膜绝缘体对于发展基于电子隧穿的先进技术至关重要。然而,目前的绝缘体沉积方法存在多种局限性,包括受限于基底尺寸、材料选择有限以及图案化的复杂性。在这里,我们报告了通过溶液法沉积大面积 AlO 薄膜,并将其集成在金属-绝缘体-金属器件中,这些器件表现出 Fowler-Nordheim 电子隧穿的 I-V 特征。一种独特的、基于纳米团簇 flat-Al 的水溶液的高纯前体转化为无电子陷阱和发射态的薄 AlO 绝缘体,这通常会抑制其他薄膜中的隧穿。隧穿还通过器件电流对温度的不依赖性得到进一步证实。