Liu Zhenhua, Xu Wenchao, Hou Zining, Wu Zhigang
State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074, China.
Ångström Laboratory, Microsystems Technology, Department of Engineering Sciences, Uppsala University, Uppsala 75121, Sweden.
Micromachines (Basel). 2016 Nov 8;7(11):201. doi: 10.3390/mi7110201.
In microfluidic device prototyping, master fabrication by traditional photolithography is expensive and time-consuming, especially when the design requires being repeatedly modified to achieve a satisfactory performance. By introducing a high-performance/cost-ratio laser to the traditional soft lithography, this paper describes a flexible and rapid prototyping technique for microfluidics. An ultraviolet (UV) laser directly writes on the photoresist without a photomask, which is suitable for master fabrication. By eliminating the constraints of fixed patterns in the traditional photomask when the masters are made, this prototyping technique gives designers/researchers the convenience to revise or modify their designs iteratively. A device fabricated by this method is tested for particle separation and demonstrates good properties. This technique provides a flexible and rapid solution to fabricating microfluidic devices for non-professionals at relatively low cost.
在微流控设备原型制作中，通过传统光刻技术制作母版成本高昂且耗时，尤其是当设计需要反复修改以达到满意性能时。通过将高性能/成本比的激光引入传统软光刻技术，本文描述了一种用于微流控的灵活且快速的原型制作技术。紫外（UV）激光无需光掩膜即可直接写入光刻胶，这适用于母版制作。通过在制作母版时消除传统光掩膜中固定图案的限制，这种原型制作技术为设计师/研究人员提供了迭代修改或调整其设计的便利。通过这种方法制造的设备进行了颗粒分离测试，并展示出良好的性能。该技术为非专业人员以相对较低的成本制造微流控设备提供了一种灵活且快速的解决方案。
