Knappett Jerome B M, Haydon Blair, Cowie Bruce C C, Kewish Cameron M, van Riessen Grant A
Department of Mathematical and Physical Sciences, School of Computing, Engineering and Mathematical Sciences, La Trobe University, Bundoora, Victoria 3086, Australia.
Australian Synchrotron, Australian Nuclear Science and Technology Organisation (ANSTO), Clayton, Victoria 3168, Australia.
J Synchrotron Radiat. 2024 May 1;31(Pt 3):485-492. doi: 10.1107/S1600577524002534. Epub 2024 Apr 17.
Synchrotron light sources can provide the required spatial coherence, stability and control to support the development of advanced lithography at the extreme ultraviolet and soft X-ray wavelengths that are relevant to current and future fabricating technologies. Here an evaluation of the optical performance of the soft X-ray (SXR) beamline of the Australian Synchrotron (AS) and its suitability for developing interference lithography using radiation in the 91.8 eV (13.5 nm) to 300 eV (4.13 nm) range are presented. A comprehensive physical optics model of the APPLE-II undulator source and SXR beamline was constructed to simulate the properties of the illumination at the proposed location of a photomask, as a function of photon energy, collimation and monochromator parameters. The model is validated using a combination of experimental measurements of the photon intensity distribution of the undulator harmonics. It is shown that the undulator harmonics intensity ratio can be accurately measured using an imaging detector and controlled using beamline optics. Finally, the photomask geometric constraints and achievable performance for the limiting case of fully spatially coherent illumination are evaluated.
同步辐射光源能够提供所需的空间相干性、稳定性和控制能力，以支持在与当前及未来制造技术相关的极紫外和软X射线波长下开展先进光刻技术的研发。本文介绍了对澳大利亚同步加速器（AS）软X射线（SXR）光束线的光学性能评估，以及其在91.8电子伏特（13.5纳米）至300电子伏特（4.13纳米）范围内利用辐射开展干涉光刻的适用性。构建了APPLE-II波荡器光源和SXR光束线的综合物理光学模型，以模拟在光掩模提议位置处照明的特性，该特性是光子能量、准直和单色仪参数的函数。通过对波荡器谐波光子强度分布进行实验测量相结合的方式对该模型进行了验证。结果表明，波荡器谐波强度比可使用成像探测器精确测量，并可通过光束线光学元件进行控制。最后，评估了光掩模的几何约束以及在完全空间相干照明的极限情况下可实现的性能。
