与CMOS读出电路单片集成的悬浮纳米通道微桥谐振器的制造与测量

Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry.

作者信息

Vidal-Álvarez Gabriel, Marigó Eloi, Torres Francesc, Barniol Núria

机构信息

Department of Electronic Engineering, Universitat Autònoma de Barcelona (UAB), Cerdanyola del Vallès 08193, Spain.

出版信息

Micromachines (Basel). 2016 Mar 2;7(3):40. doi: 10.3390/mi7030040.

DOI:10.3390/mi7030040

PMID:30407413

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6190125/

Abstract

We present the fabrication and characterization of a suspended microbridge resonator with an embedded nanochannel. The suspended microbridge resonator is electrostatically actuated, capacitively sensed, and monolithically integrated with complementary metal-oxide-semiconductor (CMOS) readout circuitry. The device is fabricated using the back end of line (BEOL) layers of the AMS 0.35 μm commercial CMOS technology, interconnecting two metal layers with a contact layer. The fabricated device has a 6 fL capacity and has one of the smallest embedded channels so far. It is able to attain a mass sensitivity of 25 ag/Hz using a fully integrable electrical transduction.

摘要

我们展示了一种带有嵌入式纳米通道的悬浮微桥谐振器的制造与特性。该悬浮微桥谐振器通过静电驱动、电容感应，并与互补金属氧化物半导体（CMOS）读出电路单片集成。该器件采用意法半导体（AMS）0.35μm商用CMOS技术的后端（BEOL）层制造，通过一个接触层连接两个金属层。所制造的器件电容为6飞升，是目前嵌入式通道最小的器件之一。通过完全可集成的电传感，它能够实现25阿秒/赫兹的质量灵敏度。