CEA-LETI/Minatec, DTBS, F-38054, Grenoble, France.
Lab Chip. 2011 Aug 7;11(15):2598-603. doi: 10.1039/c1lc20011a. Epub 2011 Jun 10.
A mass sensor innovative concept is presented here, based on a hollow plate Micro Electro Mechanical System (MEMS) resonator. This approach consists in running a solution through an embedded microchannel, while the plate resonator is actuated according to a Lamé-mode by electrostatic coupling in dry environment. The experimental results have shown a clear relationship between the measured shift of the resonance frequency and the sample solution density. Additionally, depending on the channel design and the solution properties, the quality factor (Q-factor) was noticed maintaining its level and even substantial improvement in particular cases. Resonators demonstrate resonance frequencies close to 78 MHz and Q-factor of a few thousands for liquid phase detection operating at ambient temperature and atmospheric pressure. Frequency fluctuations study revealed a 13 Hz instability level, equivalent to 1.5 fg in mass. Using a fully electronic readout configuration, a mass responsivity of ca. 850 fg kHz(-1) was monitored.
本文提出了一种基于空心板微机电系统（MEMS）谐振器的质量传感器创新概念。该方法包括在嵌入式微通道中运行溶液，同时根据干环境中的静电耦合以拉梅模式驱动板谐振器。实验结果表明，测量的共振频率偏移与样品溶液密度之间存在明显关系。此外，根据通道设计和溶液特性，在某些情况下，质量因子（Q 因子）保持其水平甚至得到实质性提高。谐振器在环境温度和大气压下的液相检测中，其共振频率接近 78 MHz，Q 因子为数千。频率波动研究表明，其不稳定水平为 13 Hz，相当于质量为 1.5 fg。使用全电子读出配置，监测到约 850 fg kHz(-1)的质量响应。
