Park Yangkyu, Moon Seunghwan, Lee Jaekwon, Kim Kwanghyun, Lee Sang-Jin, Lee Jong-Hyun
School of Mechanical Engineering, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Korea.
Micromachines (Basel). 2018 May 6;9(5):219. doi: 10.3390/mi9050219.
We present an electromagnetically driven microscanner based on a gimbal-less twist mechanism. In contrast to conventional microscanners using a gimbal-less leverage mechanism, our device utilizes a gimbal-less twist mechanism to increase the scan angle in optical applications requiring a large scanning mirror. The proposed gimbal-less scanner with twist mechanism increases the scan angle by 1.55 and 1.97 times for the slow and fast axes, respectively, under the same force; 3.64 and 1.97 times for the slow and fast axes, respectively, under the same maximum stress, compared to the gimbal-less leverage mechanism. The scanner with a 3-mm-diameter mirror and a current path composed of a single-turn coil was fabricated, and it showed the maximum scan angle of 5° (quasi-static) and 22° (resonant) for the slow and fast axes, respectively. The experimentally estimated crosstalk was as small as 0.47% and 0.97% for the fast and slow axes affected by the other axes, respectively, which was determined using a newly employed methodology based on fast Fourier transform.
我们展示了一种基于无万向节扭转机制的电磁驱动微扫描器。与使用无万向节杠杆机制的传统微扫描器不同，我们的设备利用无万向节扭转机制，在需要大扫描镜的光学应用中增加扫描角度。所提出的带有扭转机制的无万向节扫描器，在相同力的作用下，慢轴和快轴的扫描角度分别比无万向节杠杆机制增加了1.55倍和1.97倍；在相同最大应力下，慢轴和快轴的扫描角度分别比无万向节杠杆机制增加了3.64倍和1.97倍。制造了一个直径为3毫米的镜体且电流路径由单匝线圈组成的扫描器，其慢轴和快轴的最大扫描角度分别为5°（准静态）和22°（共振）。通过一种基于快速傅里叶变换的新方法测定，受其他轴影响时，快轴和慢轴的实验估计串扰分别低至0.47%和0.97%。
