Center for Nanoscale Systems , Harvard University , 11 Oxford Street , Cambridge , Massachusetts 02138 , United States.
Anal Chem. 2019 Jan 2;91(1):817-822. doi: 10.1021/acs.analchem.8b03004. Epub 2018 Dec 18.
A mid-infrared (mid-IR) sensor chip was demonstrated for volatile organic compound (VOC) detection. The sensor consisted of AsSe optical waveguides built by microelectronic fabrication processes. The VOC sensing performance was characterized by measuring acetone and ethanol vapors at their characteristic C-H absorption from λ = 3.40 to 3.50 μm. Continuous VOC detection with <5 s response time was achieved by measuring the intensity attenuation of the waveguide mode. The miniaturized noninvasive VOC sensor can be applied to breath analysis and environmental toxin monitoring.
一个中红外（mid-IR）传感器芯片被展示用于挥发性有机化合物（VOC）检测。该传感器由微电子制造工艺制造的 AsSe 光学波导组成。通过测量在特征 C-H 吸收波长 λ = 3.40 到 3.50 μm 处的丙酮和乙醇蒸气，对传感器的 VOC 传感性能进行了表征。通过测量波导模式的强度衰减，实现了具有 <5 s 响应时间的连续 VOC 检测。这种小型化的非侵入式 VOC 传感器可应用于呼吸分析和环境毒素监测。
