Chen Chun-Chi, Hwang Chorng-Sii, Chu Che-Shun
Department of Electronic Engineering, National Kaohsiung University of Science and Technology, Kaohsiung City 811, Taiwan.
Department of Electrical Engineering, National Yunlin University of Science and Technology, Yunlin County 640, Taiwan.
Rev Sci Instrum. 2018 Dec;89(12):125002. doi: 10.1063/1.5057426.
An all-digital CMOS (Complementary Metal-Oxide Semiconductor) pulse-shrinking smart temperature sensor (PSSTS) is proposed to deliver the merits of area efficiency, improved accuracy, and high resolution. First, an inverter-based temperature-sensing delay line generates a pulse with a width proportional to absolute temperature (PTAT). Then, a pulse-shrinking delay line (PSDL) with a pulse-mixing scheme (PMS) measures the PTAT pulse through pulse shrinking. The two delay lines become area efficient when the channel length of transistors is long. Conventionally, the area-efficient PSDL decreases the time resolution. Thus, the all-digital PMS considerably enhances the time resolution and achieves an excellent sensor resolution. Finally, a time subtractor improves sensor accuracy by effectively eliminating the offset error effects. The proposed sensor was implemented in a Taiwan Semiconductor Manufacturing Company 0.35-m CMOS process and occupied an area of 0.0247 mm, which is the best area among related studies. The PSSTS exhibited an improved inaccuracy from a maximal inaccuracy of 1.95 °C to 1.5 °C and an excellent resolution of approximately 0.05 °C/LSB. Experimental results prove that this study is area-efficient and achieves improved accuracy and high resolution.
本文提出了一种全数字互补金属氧化物半导体（CMOS）脉冲收缩智能温度传感器（PSSTS），该传感器具有面积效率高、精度提高和分辨率高的优点。首先，基于反相器的温度传感延迟线产生一个宽度与绝对温度成正比的脉冲（PTAT）。然后，采用脉冲混合方案（PMS）的脉冲收缩延迟线（PSDL）通过脉冲收缩来测量PTAT脉冲。当晶体管的沟道长度较长时，这两条延迟线具有面积效率。传统上，面积高效的PSDL会降低时间分辨率。因此，全数字PMS显著提高了时间分辨率，并实现了出色的传感器分辨率。最后，一个时间减法器通过有效消除失调误差影响来提高传感器精度。所提出的传感器采用台积电0.35μm CMOS工艺实现，占用面积为0.0247平方毫米，这是相关研究中面积最小的。PSSTS的最大误差从1.95℃提高到1.5℃，分辨率约为0.05℃/LSB。实验结果证明，该研究具有面积效率高、精度提高和分辨率高的特点。
