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通过与标准双倾台兼容的微机电系统(MEMS)器件对一维纳米结构进行原位透射电子显微镜力学表征。

In situ TEM mechanical characterization of one-dimensional nanostructures via a standard double-tilt holder compatible MEMS device.

作者信息

Yang Yang, Fu Zhengqian, Zhang Xiao, Cui Yan, Xu Fangfang, Li Tie, Wang Yuelin

机构信息

Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China; University of Chinese Academy of Sciences (UCAS), Beijing 100049, China.

State Key Laboratory of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China.

出版信息

Ultramicroscopy. 2019 Mar;198:43-48. doi: 10.1016/j.ultramic.2018.12.008. Epub 2018 Dec 17.

DOI:10.1016/j.ultramic.2018.12.008
PMID:30641406
Abstract

This research is aimed at the development of an in situ tensile device which is suitable for standard double-tilt electrical TEM holders. The device contains a hexagonal electrostatic chip with a diameter of 1.8 mm. The chip has 706 pairs of combs, which provides an effective tensile displacement larger than 1 µm. To demonstrate the device performance, in situ tensile testing for penta-twinned silver nanowire is conducted in a high-resolution TEM. Experimental results show that the device can fulfill a tilt angle of 10° around both X and Y axes when performing in situ tensile testing experiments. The implemented tensile device has potential applications to characterize the deformation behavior of individual nanostructure in situ TEM at atomic lattice resolution level.

摘要

本研究旨在开发一种适用于标准双倾电气透射电子显微镜(TEM)样品杆的原位拉伸装置。该装置包含一个直径为1.8毫米的六边形静电芯片。该芯片有706对梳齿,可提供大于1微米的有效拉伸位移。为了展示该装置的性能,在高分辨率TEM中对五重孪晶银纳米线进行了原位拉伸测试。实验结果表明,该装置在进行原位拉伸测试实验时,可在X和Y轴周围实现10°的倾斜角。所实现的拉伸装置在原子晶格分辨率水平下原位TEM表征单个纳米结构的变形行为方面具有潜在应用。

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