Fan Xiangrui, Wang Shengyao, Xu Dongdong, Zheng Gaige
School of Electronics & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China.
Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology (CICAEET), Nanjing University of Information Science & Technology, Nanjing 210044, China.
Micromachines (Basel). 2022 Jul 31;13(8):1228. doi: 10.3390/mi13081228.
A kind of ultra-thin transmissive color filter based on a metal-semiconductor-metal (MSM) structure is proposed. The displayed color can cover the entire visible range and switches after H treatment. An indium gallium zinc oxide (IGZO) semiconductor was employed, as the concentration of charge carriers can be controlled to adjust the refractive index and achieve certain colors. The color modulation in the designed structure was verified using the rigorous coupled wave analysis (RCWA) method. The angular independence of the relative transmission could reach up to 60°, and polarization-insensitive performance could also be maintained. Numerical results demonstrated that the thickness of IGZO was the key parameter to concentrate the incident light. The overall structure is planar and lithography-free and can be produced with simple preparation steps. The obtained results can also be extended to other similar resonators where a proper cavity allows dynamical functionality.
提出了一种基于金属-半导体-金属（MSM）结构的超薄透射式彩色滤光片。所显示的颜色可以覆盖整个可见光范围，并在H处理后切换。采用了铟镓锌氧化物（IGZO）半导体，因为可以控制电荷载流子的浓度来调节折射率并实现特定颜色。使用严格耦合波分析（RCWA）方法验证了所设计结构中的颜色调制。相对透射率的角度独立性可达60°，并且还可以保持偏振不敏感性能。数值结果表明，IGZO的厚度是集中入射光的关键参数。整体结构是平面的且无需光刻，并且可以通过简单的制备步骤来生产。所获得的结果还可以扩展到其他类似的谐振器，其中适当的腔允许动态功能。
